[go: up one dir, main page]

NO20030814L - Måling av veggtykkelse i et elektrisk ledende legeme - Google Patents

Måling av veggtykkelse i et elektrisk ledende legeme

Info

Publication number
NO20030814L
NO20030814L NO20030814A NO20030814A NO20030814L NO 20030814 L NO20030814 L NO 20030814L NO 20030814 A NO20030814 A NO 20030814A NO 20030814 A NO20030814 A NO 20030814A NO 20030814 L NO20030814 L NO 20030814L
Authority
NO
Norway
Prior art keywords
wall thickness
probe
electrically conductive
signals
conductive body
Prior art date
Application number
NO20030814A
Other languages
English (en)
Other versions
NO20030814D0 (no
Inventor
Paulus Carolus Nicolaa Crouzen
Johan Van Der Steen
Mark Theodoor Looijer
Original Assignee
Shell Int Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shell Int Research filed Critical Shell Int Research
Publication of NO20030814D0 publication Critical patent/NO20030814D0/no
Publication of NO20030814L publication Critical patent/NO20030814L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Extrusion Moulding Of Plastics Or The Like (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
NO20030814A 2000-08-24 2003-02-21 Måling av veggtykkelse i et elektrisk ledende legeme NO20030814L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00307298 2000-08-24
PCT/EP2001/009720 WO2002016863A1 (en) 2000-08-24 2001-08-22 Measuring the wall thickness of an electrically conductive object

Publications (2)

Publication Number Publication Date
NO20030814D0 NO20030814D0 (no) 2003-02-21
NO20030814L true NO20030814L (no) 2003-04-22

Family

ID=8173218

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20030814A NO20030814L (no) 2000-08-24 2003-02-21 Måling av veggtykkelse i et elektrisk ledende legeme

Country Status (11)

Country Link
US (1) US6593737B2 (no)
EP (1) EP1311800B1 (no)
JP (1) JP2004507721A (no)
CN (1) CN1447902A (no)
AT (1) ATE433092T1 (no)
AU (1) AU2001287701A1 (no)
CA (1) CA2420309A1 (no)
DE (1) DE60138891D1 (no)
NO (1) NO20030814L (no)
RU (1) RU2260172C2 (no)
WO (1) WO2002016863A1 (no)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7069101B1 (en) 1999-07-29 2006-06-27 Applied Materials, Inc. Computer integrated manufacturing techniques
US6640151B1 (en) 1999-12-22 2003-10-28 Applied Materials, Inc. Multi-tool control system, method and medium
US6708074B1 (en) 2000-08-11 2004-03-16 Applied Materials, Inc. Generic interface builder
US6570379B2 (en) * 2000-08-24 2003-05-27 Shell Oil Company Method for inspecting an object of electrically conducting material
US6538435B2 (en) * 2000-08-24 2003-03-25 Shell Oil Company Method for detecting an anomaly in an object of electrically conductive material along first and second direction at inspection points
US7188142B2 (en) 2000-11-30 2007-03-06 Applied Materials, Inc. Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility
US7698012B2 (en) 2001-06-19 2010-04-13 Applied Materials, Inc. Dynamic metrology schemes and sampling schemes for advanced process control in semiconductor processing
US6910947B2 (en) 2001-06-19 2005-06-28 Applied Materials, Inc. Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life
US7082345B2 (en) 2001-06-19 2006-07-25 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
US6913938B2 (en) 2001-06-19 2005-07-05 Applied Materials, Inc. Feedback control of plasma-enhanced chemical vapor deposition processes
US7160739B2 (en) 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
US7101799B2 (en) 2001-06-19 2006-09-05 Applied Materials, Inc. Feedforward and feedback control for conditioning of chemical mechanical polishing pad
US7047099B2 (en) 2001-06-19 2006-05-16 Applied Materials Inc. Integrating tool, module, and fab level control
US7201936B2 (en) 2001-06-19 2007-04-10 Applied Materials, Inc. Method of feedback control of sub-atmospheric chemical vapor deposition processes
US7337019B2 (en) 2001-07-16 2008-02-26 Applied Materials, Inc. Integration of fault detection with run-to-run control
US6984198B2 (en) 2001-08-14 2006-01-10 Applied Materials, Inc. Experiment management system, method and medium
US7225047B2 (en) 2002-03-19 2007-05-29 Applied Materials, Inc. Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
US20030199112A1 (en) 2002-03-22 2003-10-23 Applied Materials, Inc. Copper wiring module control
US6672716B2 (en) * 2002-04-29 2004-01-06 Xerox Corporation Multiple portion solid ink stick
JP2005535130A (ja) 2002-08-01 2005-11-17 アプライド マテリアルズ インコーポレイテッド 最新のプロセス制御システム内で誤って表された計測データを取り扱う方法、システム、および媒体
US7272459B2 (en) 2002-11-15 2007-09-18 Applied Materials, Inc. Method, system and medium for controlling manufacture process having multivariate input parameters
AU2003300579B2 (en) * 2002-12-19 2006-09-28 Tuv Rheinland Sonovation Holding B.V. Monitoring wall thickness
US7333871B2 (en) 2003-01-21 2008-02-19 Applied Materials, Inc. Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
US7205228B2 (en) 2003-06-03 2007-04-17 Applied Materials, Inc. Selective metal encapsulation schemes
US7354332B2 (en) 2003-08-04 2008-04-08 Applied Materials, Inc. Technique for process-qualifying a semiconductor manufacturing tool using metrology data
DE112004002418T5 (de) * 2003-12-10 2006-10-19 Metso Paper, Inc. Verfahren zum Steuern der Laufparameter bei einem Gerät zum Behandeln einer Faserbahn und Vorrichtung zum Anwenden dieses Verfahrens
SE527091C2 (sv) * 2003-12-31 2005-12-20 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek och elektriska ledningsförmåga hos ett mätobjekt
SE527125C2 (sv) * 2003-12-31 2005-12-27 Abb Ab Metod och anordning för beröringsfri mätning av tjocklek eller ledningsförmåga med elektromagnetisk induktion
US7356377B2 (en) 2004-01-29 2008-04-08 Applied Materials, Inc. System, method, and medium for monitoring performance of an advanced process control system
US6961626B1 (en) 2004-05-28 2005-11-01 Applied Materials, Inc Dynamic offset and feedback threshold
US7096085B2 (en) 2004-05-28 2006-08-22 Applied Materials Process control by distinguishing a white noise component of a process variance
JP4542973B2 (ja) * 2005-09-15 2010-09-15 株式会社東芝 移動距離計測装置および移動距離計測方法
AU2007298991B2 (en) 2006-09-21 2011-05-26 Tuv Rheinland Sonovation Holding B.V. Device and method for detecting an anomaly in an assembly of a first and a second object
GB2450112B (en) * 2007-06-12 2010-12-08 Ge Inspection Technologies Ltd Automatic lift-off compensation for pulsed eddy current inspection
CN101398298B (zh) * 2008-11-10 2010-09-29 清华大学 电磁超声测厚方法
US20100240900A1 (en) * 2009-03-23 2010-09-23 Headwaters Technology Innovation, Llc Dispersible carbon nanospheres and methods for making same
JP5513821B2 (ja) * 2009-09-17 2014-06-04 株式会社荏原製作所 渦電流センサ、研磨装置、めっき装置、研磨方法、めっき方法
CN101788260B (zh) * 2010-03-18 2011-12-28 清华大学 一种金属薄膜厚度的电涡流测量方法
JP4975142B2 (ja) 2010-06-17 2012-07-11 トヨタ自動車株式会社 渦流計測用センサ及び渦流計測方法
FR2981741B1 (fr) * 2011-10-20 2013-11-29 Messier Bugatti Dowty Procede de mesure d'epaisseur d'une couche de revetement par induction de champs magnetiques
US9091664B2 (en) * 2012-06-07 2015-07-28 Thomas Krause Pulsed eddy current sensor for precision measurement at-large lift-offs on metallic surfaces
US9335151B2 (en) * 2012-10-26 2016-05-10 Applied Materials, Inc. Film measurement
CN104465481A (zh) * 2013-09-22 2015-03-25 盛美半导体设备（上海）有限公司 晶圆夹盘
CN104034250B (zh) * 2014-06-30 2016-08-24 山东中科普锐检测技术有限公司 涂层测厚仪温度补偿测量方法
FR3025306B1 (fr) * 2014-08-29 2020-07-10 Safran Procede non-destructif de mesure de l'epaisseur de barriere thermique et/ou de mur en superalliage d'aube creuse de turbomachine
US10073058B2 (en) 2015-02-11 2018-09-11 Structural Integrity Associates Dynamic pulsed eddy current probe
US10895555B2 (en) 2015-03-30 2021-01-19 Structural Integrity Associates, Inc. System for in-line inspection using a dynamic pulsed eddy current probe and method thereof
CN105509631B (zh) * 2015-12-07 2018-05-18 天津因科新创科技有限公司 一种脉冲涡流壁厚检测方法和装置
CN106197249A (zh) * 2016-09-30 2016-12-07 天津华海清科机电科技有限公司 Cmp过程中铜层厚度在线测量系统及其控制方法
CN109764800A (zh) * 2019-01-15 2019-05-17 西南石油大学 一种基于涡流热成像阵列的管道腐蚀壁厚检测系统
EP4053494B1 (en) 2021-03-02 2024-08-28 ABB Schweiz AG Thickness measurement using a pulsed eddy current system
JP7541684B2 (ja) * 2022-03-22 2024-08-29 株式会社Ｉｈｉ検査計測 導電性部材の板厚評価システムと方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3555887A (en) 1967-09-19 1971-01-19 American Mach & Foundry Apparatus for electroacoustically inspecting tubular members for anomalies using the magnetostrictive effect and for measuring wall thickness
US3693075A (en) * 1969-11-15 1972-09-19 Forster F M O Eddy current system for testing tubes for defects,eccentricity,and wall thickness
DE2345848C3 (de) * 1973-09-12 1986-06-19 ELEKTRO-PHYSIK Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co KG, 5000 Köln Elektromagnetischer Schichtdickenmesser
US4383218A (en) * 1978-12-29 1983-05-10 The Boeing Company Eddy current flow detection including compensation for system variables such as lift-off
JPS5692804U (no) * 1979-12-17 1981-07-23
US4492115A (en) * 1984-04-11 1985-01-08 Pa Incorporated Method and apparatus for measuring defects in ferromagnetic tubing
DE3413787A1 (de) 1984-04-12 1985-10-17 Nukem Gmbh, 6450 Hanau Verfahren und vorrichtung zur pruefung von elektrisch leitenden gegenstaenden mittels ultraschall
FR2572175A1 (fr) 1984-10-24 1986-04-25 Stein Heurtey Procede et dispositif pour mesurer l'epaisseur de couches metalliques minces deposees sur un support conducteur
FR2574938B1 (fr) 1984-12-19 1986-12-26 Snecma Methode de controle par courants de foucault sans contact et dispositif de mise en oeuvre
JPS61151402A (ja) * 1984-12-26 1986-07-10 Nippon Kokan Kk <Nkk> 差動相互誘導型渦流計測用センサ
US4644271A (en) * 1985-02-25 1987-02-17 Ltv Steel Company, Inc. Method and apparatus for examining a workpiece
JPS62225947A (ja) * 1986-03-26 1987-10-03 Kobe Steel Ltd 渦流測定用プロ−ブ
US4945305A (en) 1986-10-09 1990-07-31 Ascension Technology Corporation Device for quantitatively measuring the relative position and orientation of two bodies in the presence of metals utilizing direct current magnetic fields
SE451886B (sv) 1986-10-10 1987-11-02 Sten Linder Sett och anordning for beroringsfri metning av storheter hos eller i anslutning till elektriskt ledande material
JPS63139202A (ja) * 1986-12-02 1988-06-11 Nippon Telegr & Teleph Corp <Ntt> 電磁誘導形肉厚測定方法および測定装置
US4843320A (en) 1987-12-17 1989-06-27 Atlantic Richfield Company Transient electromagnetic method for detecting corrosion on conductive containers
US4929898A (en) * 1987-12-17 1990-05-29 Atlantic Richfield Transient electromagnetic method for detecting irregularities on conductive containers
US4849693A (en) * 1988-02-29 1989-07-18 Battelle Memorial Institute Automated measurement system employing eddy currents to adjust probe position and determine metal hardness
US4843317A (en) 1988-10-18 1989-06-27 Conoco Inc. Method and apparatus for measuring casing wall thickness using a flux generating coil with radial sensing coils and flux leakage sensing coils
JPH0654206B2 (ja) * 1989-09-05 1994-07-20 株式会社ニレコ 渦電流距離測定装置
US5198764A (en) 1991-02-22 1993-03-30 Sentech Corp. Position detector apparatus and method utilizing a transient voltage waveform processor
US5491409A (en) * 1992-11-09 1996-02-13 The Babcock & Wilcox Company Multiple yoke eddy current technique for detection of surface defects on metal components covered with marine growth
US5569835A (en) 1994-08-10 1996-10-29 Ultrasonic Arrays, Inc. Reference wire compensation method and apparatus
US5592092A (en) 1994-10-28 1997-01-07 Gas Research Institute Pipe proximity warning device for accidental damage prevention mounted on the bucket of a backhoe
US5541510A (en) * 1995-04-06 1996-07-30 Kaman Instrumentation Corporation Multi-Parameter eddy current measuring system with parameter compensation technical field
SE508354C2 (sv) 1996-07-05 1998-09-28 Asea Atom Ab Förfarande och anordning för bestämning av skikttjocklek
US6291992B1 (en) 1996-07-12 2001-09-18 Shell Oil Company Eddy current inspection technique
NL1005160C2 (nl) * 1997-01-31 1998-08-03 Roentgen Tech Dienst Bv Inrichting voor het bepalen van eigenschappen van een elektrisch geleidend voorwerp.
US6037768A (en) * 1997-04-02 2000-03-14 Iowa State University Research Foundation, Inc. Pulsed eddy current inspections and the calibration and display of inspection results
US6201987B1 (en) 1998-05-26 2001-03-13 General Electric Company Error compensation for device tracking systems employing electromagnetic fields
US6344741B1 (en) * 2000-06-20 2002-02-05 Her Majesty The Queen As Represented By The Minister Of National Defence In Right Of Canada Pulsed eddy current method for detection of corrosion in multilayer structures using the lift-off point of intersection

Also Published As

Publication number Publication date
EP1311800A1 (en) 2003-05-21
JP2004507721A (ja) 2004-03-11
NO20030814D0 (no) 2003-02-21
US6593737B2 (en) 2003-07-15
RU2260172C2 (ru) 2005-09-10
WO2002016863A1 (en) 2002-02-28
AU2001287701A1 (en) 2002-03-04
EP1311800B1 (en) 2009-06-03
US20020149359A1 (en) 2002-10-17
CA2420309A1 (en) 2002-02-28
CN1447902A (zh) 2003-10-08
DE60138891D1 (de) 2009-07-16
ATE433092T1 (de) 2009-06-15

Similar Documents

Publication Publication Date Title
NO20030814L (no) Måling av veggtykkelse i et elektrisk ledende legeme
WO2003073040A3 (en) Measurement method for determining a surface profile
US8456178B2 (en) Method and device for inductive conductivity measurements of a fluid medium
GB2425359A (en) Method for measuring transient electromagnetic components to perform deep geosteering while drilling
AU6218201A (en) Detecting errors in the determination of magnetic location or orientation
WO2003031686A3 (en) Cathodic protection remote monitoring method and apparatus
EP1391751A3 (de) Verfahren und Vorrichtung zur schnellen tomographischen Messung der elektrischen Leitfähigkeitsverteilung in einer Probe
DE60012171D1 (en) STROMSENSOR MIT ISOLATIONSTRäGER
AU2467001A (en) A digital eddy current proximity system: apparatus and method
WO2006014972A3 (en) Impedance measurement for an implantable device
ES8304318A1 (es) &#34;dispositivo convertidor de medicion carente de nucleo magnetico, para la medicion exenta de potencial de una corriente de medicion&#34;.
CA2361315A1 (en) Multi-coil electromagnetic focusing methods and apparatus to reduce borehole eccentricity effects
NO20030815L (no) Inspeksjon av et legeme av elektrisk ledende materiale
NO20053506D0 (no) Fremgangsmate for overvaking av veggtykkelse
CA2424250A1 (en) Apparatus for measuring terrain conductivity
MY126952A (en) Apparatus for measuring electric charge
WO2006114561A3 (en) True amplitude transient electromagnetic system response measurement
GB2411242A (en) Method and apparatus using a quadrupole transmitter in directionally sensitive induction tool
WO2003034054A3 (en) Method and apparatus for measuring material properties and lift-off components of an object using a magnetic probe
NZ519464A (en) A method and an apparatus for improving measurement sensitivity of a parameter of a fluid
MD2645G2 (ro) Dispozitiv pentru măsurarea rezistenţei liniare a conductorului izolat
WO2001046682A3 (de) Verfahren und vorrichtung zur in situ-ermittlung des umwandlungsgrads einer nichtmagnetischen phase in eine ferromagnetische phase eines metallischen werkstücks
DE59912946D1 (de) Messwertaufnehmer zur Temperaturmessung an ölgefüllten Betriebsmitteln und dafür geeignetes Verfahren zur Temperaturmessung
Harrold The relationship between ultrasonic and electrical measurements of under-oil corona sources
WO2007017685A3 (en) Pipe evaluation apparatus and method

Legal Events

Date Code Title Description
FC2A Withdrawal, rejection or dismissal of laid open patent application