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NO20026151L - Akselerometer med U-formede opphengselementer - Google Patents

Akselerometer med U-formede opphengselementer

Info

Publication number
NO20026151L
NO20026151L NO20026151A NO20026151A NO20026151L NO 20026151 L NO20026151 L NO 20026151L NO 20026151 A NO20026151 A NO 20026151A NO 20026151 A NO20026151 A NO 20026151A NO 20026151 L NO20026151 L NO 20026151L
Authority
NO
Norway
Prior art keywords
accelerometer
suspension elements
spring assembly
shaped suspension
mass
Prior art date
Application number
NO20026151A
Other languages
English (en)
Other versions
NO20026151D0 (no
Inventor
Arjun Selvakumar
Duli Yu
Lianzhong Yu
Ben W Jones
Original Assignee
Input Output Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Input Output Inc filed Critical Input Output Inc
Publication of NO20026151D0 publication Critical patent/NO20026151D0/no
Publication of NO20026151L publication Critical patent/NO20026151L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0016—Protection against shocks or vibrations, e.g. vibration damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0163—Spring holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Remote Sensing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Acoustics & Sound (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Geology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Sensors (AREA)

Abstract

Et akselerometer (305) som omfatter en målemasse (1405) for deteksjon av akselerasjon er anordnet i et hus (315) slik at det dannes et innvendig hulrom (320). Massen (1405) er oppspent i hulrommet med en fjærsammenstilling (1400) i en bærekonstruksjon (1410). Fjærsammenstillingen omfatter foldede fjærelementer (1415) koplet til konstruksjonen. (1410). Et eller flere elektrodemønstere (910) er koplet til fjærsammenstillingen (1400). En toppskive (405) med tilhørende kapasitiv elektrode (705), så vel som en bunnskive (420) med sin tilhørende kapasitive elektrode (805) er også koplet til massen (1405).
NO20026151A 2000-06-21 2002-12-20 Akselerometer med U-formede opphengselementer NO20026151L (no)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21299700P 2000-06-21 2000-06-21
US21760900P 2000-07-11 2000-07-11
PCT/US2001/019796 WO2001098786A1 (en) 2000-06-21 2001-06-21 Accelerometer with folded beams

Publications (2)

Publication Number Publication Date
NO20026151D0 NO20026151D0 (no) 2002-12-20
NO20026151L true NO20026151L (no) 2003-02-14

Family

ID=26907684

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20026151A NO20026151L (no) 2000-06-21 2002-12-20 Akselerometer med U-formede opphengselementer

Country Status (6)

Country Link
US (2) US6805008B2 (no)
EP (2) EP2136215A3 (no)
AU (1) AU2001270026A1 (no)
CA (1) CA2413965C (no)
NO (1) NO20026151L (no)
WO (1) WO2001098786A1 (no)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10116931A1 (de) 2001-04-05 2002-10-17 Bosch Gmbh Robert Sensor
US7248703B1 (en) 2001-06-26 2007-07-24 Bbn Technologies Corp. Systems and methods for adaptive noise cancellation
US7274621B1 (en) 2002-06-13 2007-09-25 Bbn Technologies Corp. Systems and methods for flow measurement
US7138293B2 (en) * 2002-10-04 2006-11-21 Dalsa Semiconductor Inc. Wafer level packaging technique for microdevices
US7255196B1 (en) 2002-11-19 2007-08-14 Bbn Technologies Corp. Windshield and sound-barrier for seismic sensors
US6865944B2 (en) * 2002-12-16 2005-03-15 Honeywell International Inc. Methods and systems for decelerating proof mass movements within MEMS structures
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US6718825B1 (en) 2003-01-17 2004-04-13 Honeywell International Inc. Methods and systems for reducing stick-down within MEMS structures
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
EP1491901A1 (en) * 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
US7284431B1 (en) * 2003-11-14 2007-10-23 Bbn Technologies Corp. Geophone
US7013730B2 (en) * 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
US7012322B2 (en) * 2003-12-22 2006-03-14 Honeywell International Inc. Method for reducing harmonic distortion in comb drive devices
US7036373B2 (en) 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
US7232701B2 (en) * 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US7516661B2 (en) * 2006-02-23 2009-04-14 Honeywell International Inc. Z offset MEMS device
DE102007002725A1 (de) * 2007-01-18 2008-07-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gehäuse für in mobilen Anwendungen eingesetzte mikromechanische und mikrooptische Bauelemente
US20080253226A1 (en) * 2007-04-11 2008-10-16 Stig Rune Lennart Tenghamn System and method for marine seismic surveying
JP5165294B2 (ja) * 2007-07-06 2013-03-21 三菱電機株式会社 静電容量式加速度センサ
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8104346B2 (en) * 2008-11-10 2012-01-31 Westerngeco L.L.C. MEMS-based capacitive sensor
US8098546B2 (en) * 2009-07-08 2012-01-17 Geospace Technologies, Lp Geophone having improved sensitivity
US8050144B2 (en) * 2009-07-08 2011-11-01 Geospace Technologies Lp Vertical geophone having improved distortion characteristics
US8208347B2 (en) * 2009-07-08 2012-06-26 Geospace Technologies, Lp Geophone having improved damping control
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US8709264B2 (en) 2010-06-25 2014-04-29 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US9010170B2 (en) 2010-08-16 2015-04-21 Westerngeco L.L.C. Method and apparatus to test an accelerometer
US9217805B2 (en) 2010-10-01 2015-12-22 Westerngeco L.L.C. Monitoring the quality of particle motion data during a seismic acquisition
RU2603438C2 (ru) * 2011-02-07 2016-11-27 Ион Джиофизикал Корпорейшн Способ и устройство для обнаружения подводных сигналов
US10292445B2 (en) 2011-02-24 2019-05-21 Rochester Institute Of Technology Event monitoring dosimetry apparatuses and methods thereof
US9339224B2 (en) 2011-02-24 2016-05-17 Rochester Institute Of Technology Event dosimeter devices and methods thereof
CN102602879B (zh) * 2011-11-23 2016-01-06 中国计量学院 谐振式加速度计谐振梁和支撑梁的二步腐蚀制造方法
GB2498520A (en) * 2012-01-13 2013-07-24 Secr Defence Accelerometer
US8800371B2 (en) * 2012-03-08 2014-08-12 Industrial Technology Research Institute Electrostatic force generator and force measurement system and accelerometer having the same
JP6186598B2 (ja) * 2012-04-20 2017-08-30 パナソニックＩｐマネジメント株式会社 慣性力センサ
WO2013161597A1 (ja) * 2012-04-27 2013-10-31 株式会社村田製作所 加速度センサ
CN103675345B (zh) 2012-09-21 2017-12-01 中国科学院地质与地球物理研究所 一种加速度计及其制造工艺
CN103675346B (zh) 2012-09-21 2018-03-06 中国科学院地质与地球物理研究所 一种加速度计及其制造工艺
CN102879609B (zh) * 2012-10-26 2013-11-27 中国科学院上海微系统与信息技术研究所 “h”形梁的电容式加速度传感器及制备方法
CN102879608B (zh) * 2012-10-26 2014-12-24 中国科学院上海微系统与信息技术研究所 弯折形弹性梁的电容式加速度传感器及制备方法
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
US20140260617A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
CN104166016B (zh) 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 一种高灵敏度三轴mems加速度计及其制造工艺
CN104296784B (zh) * 2013-07-19 2017-02-15 中国科学院地质与地球物理研究所 一种mems检测装置及其制造工艺
US9470806B2 (en) * 2013-08-29 2016-10-18 Pgs Geophysical As Piezoelectric accelerometer
EP3147258A1 (en) * 2015-09-22 2017-03-29 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Connection panel for electronic components
US10345330B2 (en) 2015-09-25 2019-07-09 Apple Inc. Mechanical low pass filter for motion sensors
US10324105B2 (en) * 2015-09-25 2019-06-18 Apple Inc. Mechanical low pass filter for motion sensors
CN107045073B (zh) * 2017-02-07 2019-07-09 中国科学院上海微系统与信息技术研究所 单硅片双面对称折叠梁结构微加速度传感器及其制作方法
FR3090613B1 (fr) * 2018-12-20 2021-01-22 Commissariat Energie Atomique Articulation pour systemes micro et nanoelectromecaniques a deplacement hors-plan offrant une non-linearite reduite
CN109704268A (zh) * 2019-02-21 2019-05-03 厦门大学 一种可拉伸电子干扰变形免疫基材

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877296A (en) * 1970-12-09 1975-04-15 Kinemetrics Inc Strong motion accelerograph with self-starter and electrical as well as light outputs
US3884085A (en) * 1972-04-05 1975-05-20 Robinson Halpern Company Accelerometer assembly
US4922756A (en) 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US5095749A (en) * 1986-08-25 1992-03-17 Hanson Richard A Proofmass suspension assembly for accelerometers
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5345823A (en) * 1991-11-12 1994-09-13 Texas Instruments Incorporated Accelerometer
US5412987A (en) * 1992-09-24 1995-05-09 Siemens Automotive L.P. Folded cantilever beam accelerometer
US5507182A (en) * 1993-02-18 1996-04-16 Nippondenso Co., Ltd. Semiconductor accelerometer with damperless structure
US5777226A (en) 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5484073A (en) 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
EP0753156B1 (en) * 1994-03-28 2001-07-25 I/O Sensors, Inc. Sensor structure with l-shaped spring legs
DE19509868A1 (de) * 1995-03-17 1996-09-19 Siemens Ag Mikromechanisches Halbleiterbauelement
US5852242A (en) 1995-12-04 1998-12-22 I/O Sensors, Inc. Apparatus with mechanical and electric springs and method for its manufacture
JPH10173052A (ja) * 1996-12-13 1998-06-26 Fujitsu Ltd 半導体装置及びその製造方法
US5831162A (en) * 1997-01-21 1998-11-03 Delco Electronics Corporation Silicon micromachined motion sensor and method of making
US5674775A (en) * 1997-02-20 1997-10-07 Taiwan Semiconductor Manufacturing Company, Ltd. Isolation trench with a rounded top edge using an etch buffer layer
US6077790A (en) * 1997-03-14 2000-06-20 Micron Technology, Inc. Etching process using a buffer layer
US6223598B1 (en) * 1997-06-18 2001-05-01 Analog Devices, Inc. Suspension arrangement for semiconductor accelerometer
JP3439135B2 (ja) * 1998-10-05 2003-08-25 沖電気工業株式会社 半導体装置の製造方法及び半導体装置
US6105428A (en) * 1998-12-10 2000-08-22 Motorola, Inc. Sensor and method of use
US6128954A (en) * 1998-12-18 2000-10-10 Delco Electronics Corporation Spring for a resonance ring of an angular rate sensor
US6158815A (en) * 1998-12-24 2000-12-12 Toyo Tire & Rubber Co., Ltd. Seat having a seat cushion including a polyurethane foam pad onto a portion of which a stretchable, nonwoven fabric is laminated
US6035694A (en) * 1999-03-12 2000-03-14 I/O Of Austin, Inc. Method and apparatus for calibration of stray capacitance mismatch in a closed loop electro-mechanical accelerometer
KR100404560B1 (ko) * 2001-01-06 2003-11-05 삼성전자주식회사 반도체 장치의 제조방법
US6393914B1 (en) * 2001-02-13 2002-05-28 Delphi Technologies, Inc. Angular accelerometer

Also Published As

Publication number Publication date
NO20026151D0 (no) 2002-12-20
WO2001098786A1 (en) 2001-12-27
US6805008B2 (en) 2004-10-19
US20020178817A1 (en) 2002-12-05
EP1311863A1 (en) 2003-05-21
CA2413965A1 (en) 2001-12-27
CA2413965C (en) 2011-01-11
EP2136215A3 (en) 2014-01-01
EP1311863A4 (en) 2003-07-30
EP2136215A2 (en) 2009-12-23
AU2001270026A1 (en) 2002-01-02
US20040255675A1 (en) 2004-12-23

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