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NL1023376C2 - Dunne laag en werkwijze voor het vervaardigen van een dunne laag. - Google Patents

Dunne laag en werkwijze voor het vervaardigen van een dunne laag. Download PDF

Info

Publication number
NL1023376C2
NL1023376C2 NL1023376A NL1023376A NL1023376C2 NL 1023376 C2 NL1023376 C2 NL 1023376C2 NL 1023376 A NL1023376 A NL 1023376A NL 1023376 A NL1023376 A NL 1023376A NL 1023376 C2 NL1023376 C2 NL 1023376C2
Authority
NL
Netherlands
Prior art keywords
thin layer
sublayers
layers
layer
behavior
Prior art date
Application number
NL1023376A
Other languages
English (en)
Dutch (nl)
Inventor
Marcel Hoekman
Rene Gerrit Heideman
Joseph Wilhelmus Mari Hoekstra
Original Assignee
Lionix B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lionix B V filed Critical Lionix B V
Priority to NL1023376A priority Critical patent/NL1023376C2/nl
Priority to PCT/NL2004/000308 priority patent/WO2004099864A2/fr
Application granted granted Critical
Publication of NL1023376C2 publication Critical patent/NL1023376C2/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
NL1023376A 2003-05-09 2003-05-09 Dunne laag en werkwijze voor het vervaardigen van een dunne laag. NL1023376C2 (nl)

Priority Applications (2)

Application Number Priority Date Filing Date Title
NL1023376A NL1023376C2 (nl) 2003-05-09 2003-05-09 Dunne laag en werkwijze voor het vervaardigen van een dunne laag.
PCT/NL2004/000308 WO2004099864A2 (fr) 2003-05-09 2004-05-10 Transducteur electro-optique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1023376 2003-05-09
NL1023376A NL1023376C2 (nl) 2003-05-09 2003-05-09 Dunne laag en werkwijze voor het vervaardigen van een dunne laag.

Publications (1)

Publication Number Publication Date
NL1023376C2 true NL1023376C2 (nl) 2004-11-15

Family

ID=33432525

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1023376A NL1023376C2 (nl) 2003-05-09 2003-05-09 Dunne laag en werkwijze voor het vervaardigen van een dunne laag.

Country Status (2)

Country Link
NL (1) NL1023376C2 (fr)
WO (1) WO2004099864A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7657188B2 (en) * 2004-05-21 2010-02-02 Coveytech Llc Optical device and circuit using phase modulation and related methods
US7409131B2 (en) 2006-02-14 2008-08-05 Coveytech, Llc All-optical logic gates using nonlinear elements—claim set V

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4923526A (en) * 1985-02-20 1990-05-08 Mitsubishi Denki Kabushiki Kaisha Homogeneous fine grained metal film on substrate and manufacturing method thereof
EP0799906A1 (fr) * 1996-04-04 1997-10-08 Texas Instruments Incorporated Dispositif semi-conducteur
US20020102352A1 (en) * 1999-12-02 2002-08-01 Klaus Hartig Haze-resistant transparent film stacks

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1275317C (fr) * 1984-02-28 1990-10-16 Charles B. Roxlo Dispositifs electro-optiques a super-reseau
US5194983A (en) * 1986-11-27 1993-03-16 Centre National De La Recherche Scientifique (C.N.R.S.) Superlattice optical monitor
JP2606079B2 (ja) * 1993-06-25 1997-04-30 日本電気株式会社 光半導体素子
US6501092B1 (en) * 1999-10-25 2002-12-31 Intel Corporation Integrated semiconductor superlattice optical modulator
US6999219B2 (en) * 2001-01-30 2006-02-14 3Dv Systems, Ltd. Optical modulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4923526A (en) * 1985-02-20 1990-05-08 Mitsubishi Denki Kabushiki Kaisha Homogeneous fine grained metal film on substrate and manufacturing method thereof
EP0799906A1 (fr) * 1996-04-04 1997-10-08 Texas Instruments Incorporated Dispositif semi-conducteur
US20020102352A1 (en) * 1999-12-02 2002-08-01 Klaus Hartig Haze-resistant transparent film stacks

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
DELOACH J D ET AL: "Growth-controlled cubic zirconia microstructure in zirconia-titania nanolaminates", JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (VACUUM, SURFACES, AND FILMS), SEPT. 2002, AIP FOR AMERICAN VACUUM SOC, USA, vol. 20, no. 5, pages 1517 - 1524, XP002266870, ISSN: 0734-2101 *
KOBAYASHI H ET AL: "FABRICATION OF PIEZOELECTRIC THIN FILM RESONATORS WITH ACOUSTIC QUARTER-WAVE MULTILAYERS", JAPANESE JOURNAL OF APPLIED PHYSICS, PUBLICATION OFFICE JAPANESE JOURNAL OF APPLIED PHYSICS. TOKYO, JP, vol. 41, no. 5B, PART 1, May 2002 (2002-05-01), pages 3455 - 3457, XP001163738, ISSN: 0021-4922 *

Also Published As

Publication number Publication date
WO2004099864A3 (fr) 2005-03-17
WO2004099864A2 (fr) 2004-11-18

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Legal Events

Date Code Title Description
PD2B A search report has been drawn up
VD1 Lapsed due to non-payment of the annual fee

Effective date: 20071201