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MY167037A - Mounting table vibration suppression device, and mounting table vibration suppression method - Google Patents

Mounting table vibration suppression device, and mounting table vibration suppression method

Info

Publication number
MY167037A
MY167037A MYPI2012701085A MYPI2012701085A MY167037A MY 167037 A MY167037 A MY 167037A MY PI2012701085 A MYPI2012701085 A MY PI2012701085A MY PI2012701085 A MYPI2012701085 A MY PI2012701085A MY 167037 A MY167037 A MY 167037A
Authority
MY
Malaysia
Prior art keywords
mounting table
leaf spring
center section
vibration suppression
table vibration
Prior art date
Application number
MYPI2012701085A
Inventor
Hitoshi Matsushita
Hirokazu Yoshioka
Yoshinori Takahashi
Original Assignee
Takenaka Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takenaka Corp filed Critical Takenaka Corp
Publication of MY167037A publication Critical patent/MY167037A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

THE VIBRATION OF A MOUNTING TABLE CAUSED BY EQUIPMENT MOUNTED ON THE MOUNTING TABLE BEING MOVED IS SUPPRESSED. A VIBRATION SUPPRESSION DEVICE (10) IS PROVIDED WITH A FIXING MEMBER (14). THE FIXING MEMBER (14) IS AFFIXED TO A MOUNTING TABLE (12) MOUNTED WITH EQUIPMENT AND SUPPORTED BY A MOUNT BY MEANS OF A VIBRATION ABSORPTION MEANS. THE FIXING MEMBER (14) HAS A FLAT CENTER SECTION (14C) AND IS AFFIXED TO THE MOUNTING TABLE (12) BY MEANS OF PERPENDICULAR SECTIONS (14E) FORMED BY BENDING BOTH ENDS OF CENTER SECTION (14C). A CLAMPING MEANS (54) IS DISPOSED ON BOTH ENDS OF CENTER SECTION (14C). THE CLAMPING MEANS (54) HAS AN UPPER LEAF SPRING (20) AND A LOWER LEAF SPRING (22). THE UPPER LEAF SPRING (20) IS AFFIXED TO CENTER SECTION (18C) OF AN UPPER LEAF SPRING ATTACHMENT BASE (18), AND THE LOWER LEAF SPRING (22) IS ATTACHED TO AN ATTACHMENT BASE (17) DISPOSED ON THE MOUNT. CENTER SECTION (18C) IS INSERTED INTO A SPACE SURROUNDED BY THE FIXING MEMBER (14) AND THE MOUNTING TABLE (12) AND IS ATTACHED TO THE ATTACHMENT BASE (17) BY MEANS OF LEG SECTIONS FORMED BY BENDING BOTH ENDS OF CENTER SECTION (18C). AN ACTUATOR (24) FOR TRANSFORMING THE LOWER LEAF SPRING (22) IS ATTACHED TO THE LOWER LEAF SPRING (22).
MYPI2012701085A 2010-06-09 2011-06-08 Mounting table vibration suppression device, and mounting table vibration suppression method MY167037A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010132362 2010-06-09
JP2011119198A JP5820621B2 (en) 2010-06-09 2011-05-27 Mounting table vibration suppressing device and mounting table vibration suppressing method

Publications (1)

Publication Number Publication Date
MY167037A true MY167037A (en) 2018-08-02

Family

ID=45098148

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2012701085A MY167037A (en) 2010-06-09 2011-06-08 Mounting table vibration suppression device, and mounting table vibration suppression method

Country Status (3)

Country Link
JP (1) JP5820621B2 (en)
MY (1) MY167037A (en)
WO (1) WO2011155544A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5995575B2 (en) * 2012-07-20 2016-09-21 株式会社竹中工務店 Vibration suppression device
JP6148911B2 (en) * 2013-06-27 2017-06-14 特許機器株式会社 Anti-vibration stopper structure and anti-vibration stand having the anti-vibration stopper structure
DE102013215701A1 (en) * 2013-08-08 2015-02-12 Siemens Aktiengesellschaft Electric machine with superconducting rotor coil and supporting device
JP6393514B2 (en) * 2014-04-30 2018-09-19 株式会社竹中工務店 Displacement suppression device
JP6735606B2 (en) * 2016-06-02 2020-08-05 株式会社竹中工務店 Vibration control device
JP7166865B2 (en) * 2018-10-01 2022-11-08 株式会社ニューフレアテクノロジー Charged particle beam device
CN113510446B (en) * 2021-07-05 2023-07-14 中铁建设集团中南建设有限公司 A construction method for processing special-shaped steel components by using a positioning frame

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61286634A (en) * 1985-06-14 1986-12-17 Meiritsu Seiki Kk Vibration suppressing apparatus
JP2005166996A (en) * 2003-12-03 2005-06-23 Nikon Corp Substrate processing apparatus and device manufacturing method

Also Published As

Publication number Publication date
JP2012017846A (en) 2012-01-26
WO2011155544A1 (en) 2011-12-15
JP5820621B2 (en) 2015-11-24

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