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MY135679A - Method and system of automatic fluid dispensing for imprint lithography processes - Google Patents

Method and system of automatic fluid dispensing for imprint lithography processes

Info

Publication number
MY135679A
MY135679A MYPI20030077A MY135679A MY 135679 A MY135679 A MY 135679A MY PI20030077 A MYPI20030077 A MY PI20030077A MY 135679 A MY135679 A MY 135679A
Authority
MY
Malaysia
Prior art keywords
substrate
imprint lithography
lithography processes
fluid dispensing
automatic fluid
Prior art date
Application number
Inventor
Choi Byung Jin
Colburn Matthew
S V Sreeni-Vasan
Bailey Todd
Willson C Grant
Eckerdt John
Original Assignee
Univ Texas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Texas filed Critical Univ Texas
Priority to MYPI20030077 priority Critical patent/MY135679A/en
Publication of MY135679A publication Critical patent/MY135679A/en

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  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

DISCLOSED HEREIN IS AN AUTOMATIC FLUID DISPENSING METHOD AND SYSTEM FOR DISPENSING FLUID ON THE SURFACE OF PLATE-LIKE MATERIAL, OR SUBSTRATE(20), INCLUDING A SEMICONDUCTOR WAFER FOR IMPRINT LITHOGRAPHY PROCESSES. THE DISPENSING METHOD USES FLUID DISPENSER AND A SUBSTRATE STAGE THAT MAY GENERATE RELATIVE LATERAL MOTIONS BETWEEN A FLUID DISPENSER TIP (1001;1002) AND A SUBSTRATE. ALSO DESCRIBED HEREIN ARE METHODS AND DEVICES FOR CREATING A PLANAR SURFACE ON A SUBSTRATE(20) USING A SUBSTANTIALLY UNPATTERNED PLANAR TEMPLATE(12).FIG. 11
MYPI20030077 2003-01-10 2003-01-10 Method and system of automatic fluid dispensing for imprint lithography processes MY135679A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20030077 MY135679A (en) 2003-01-10 2003-01-10 Method and system of automatic fluid dispensing for imprint lithography processes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20030077 MY135679A (en) 2003-01-10 2003-01-10 Method and system of automatic fluid dispensing for imprint lithography processes

Publications (1)

Publication Number Publication Date
MY135679A true MY135679A (en) 2008-06-30

Family

ID=45879165

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20030077 MY135679A (en) 2003-01-10 2003-01-10 Method and system of automatic fluid dispensing for imprint lithography processes

Country Status (1)

Country Link
MY (1) MY135679A (en)

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