Hosokawa et al., 2000 - Google Patents
A pneumatically-actuated three-way microvalve fabricated withpolydimethylsiloxane using the membrane transfer techniqueHosokawa et al., 2000
- Document ID
- 345207738081574400
- Author
- Hosokawa K
- Maeda R
- Publication year
- Publication venue
- Journal of micromechanics and microengineering
External Links
Snippet
In this paper, a three-way microvalve system composed of three independent one-way valve units is presented. Each valve unit has a membrane, which is actuated by external negative air pressure. Intervals between the valve units are smaller than 780 µm, which opens up the …
- 239000012528 membrane 0 title abstract description 41
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