Zaouk, 2008 - Google Patents
Carbon MEMS from the nanoscale to the macroscale: Novel fabrication techniques and applications in electrochemistryZaouk, 2008
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- 2076603683056716608
- Author
- Zaouk R
- Publication year
- Publication venue
- Dissertation Abstracts International
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Micro ElectroMechanical Systems (MEMS), or the science of miniaturization, refers to a class of devices that have at least one of their dimensions in the micrometer range. While Integrated Circuit (IC) devices only involve electrical components (transistors, diodes …
- 238000004519 manufacturing process 0 title abstract description 66
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