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Iliescu et al., 2004 - Google Patents

Fabrication of a dielectrophoretic chip with 3D silicon electrodes

Iliescu et al., 2004

Document ID
1333552084739066708
Author
Iliescu C
Xu G
Samper V
Tay F
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

This paper describes a device in which the DEP electrodes form the channel walls. This is achieved by fabricating microfluidic channel walls from highly doped silicon so that they can also function as DEP electrodes. The device is fully enclosed and there is no fluidic leakage …
Continue reading at iopscience.iop.org (other versions)

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