Perez, 1984 - Google Patents
Ion implantation effects in crystalline inorganic insulatorsPerez, 1984
- Document ID
- 11783608596667724951
- Author
- Perez A
- Publication year
- Publication venue
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
External Links
Snippet
Heavy ion bombardment of inorganic insulators causes complex structural changes and chemical effects, the knowledge of which has been limited until now. The solid phase which is created can incorporate implanted impurities in various charge states. These can be …
- 230000000694 effects 0 title abstract description 22
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