Lin et al., 2006 - Google Patents
Novel two-bit HfO/sub 2/nanocrystal nonvolatile flash memoryLin et al., 2006
View PDF- Document ID
- 10744295110459455752
- Author
- Lin Y
- Chien C
- Lin C
- Chang C
- Lei T
- Publication year
- Publication venue
- IEEE Transactions on Electron Devices
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Snippet
This paper presents a novel nonvolatile poly-Si-oxide-nitride-oxide-silicon-type Flash memory that was fabricated using hafnium oxide (HfO/sub 2/) nanocrystals as the trapping storage layer. The formation of HfO/sub 2/nanocrystals was confirmed using a number of …
- 239000002159 nanocrystal 0 title abstract description 80
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