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Das et al., 2012 - Google Patents

Resonant controller for fast atomic force microscopy

Das et al., 2012

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Document ID
10686917536968332873
Author
Das S
Pota H
Petersen I
Publication year
Publication venue
2012 IEEE 51st IEEE Conference on Decision and Control (CDC)

External Links

Snippet

The imaging performance of the atomic force microscope (AFM) in higher scanning speed is limited to the one percent of the first resonant frequency of it's scanning unit ie, piezoelectric tube scanner (PTS). In order to speed up the functioning of the AFM for high speed imaging …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

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