Liu et al., 2014 - Google Patents
Selective area in situ conversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxideLiu et al., 2014
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- 1057620942684636067
- Author
- Liu N
- Huang X
- Dubowski J
- Publication year
- Publication venue
- Journal of Physics D: Applied Physics
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We report on a method of rapid conversion of a hydrophobic to hydrophilic state of an Si (0 0 1) surface irradiated with a relatively low number of pulses of an excimer laser. Hydrophilic Si (0 0 1), characterized by the surface contact angle (CA) of near 15, is fabricated following …
- 230000002209 hydrophobic 0 title abstract description 14
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