[go: up one dir, main page]

Wang et al., 2022 - Google Patents

On the synergy manipulation between the activation temperature, surface resistance and secondary electron yield of NEG thin films

Wang et al., 2022

Document ID
9637810642766335781
Author
Wang S
Zhu B
Gao Y
Shu X
Wei W
Zhang W
Wang Y
Publication year
Publication venue
Applied Surface Science

External Links

Snippet

The operation of the modern accelerators has long been challenged with the problems associated with distributed vacuum profile and electron multipacting. Applying a Ti-Zr-V based non-evaporable getter (NEG) film provides an ideal solution to these problems …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases

Similar Documents

Publication Publication Date Title
Wang et al. On the synergy manipulation between the activation temperature, surface resistance and secondary electron yield of NEG thin films
Nistor et al. Multipactor suppression by micro-structured gold/silver coatings for space applications
Pei et al. Microstructural control of TiC/aC nanocomposite coatings with pulsed magnetron sputtering
Shanaghi et al. Structure and corrosion resistance of Ti/TiC coatings fabricated by plasma immersion ion implantation and deposition on nickel–titanium
Wang et al. Characterization of Ti–Zr–V thin films deposited by DC and unipolar pulsed DC magnetron sputtering
Alawajji et al. Electrical properties of multilayer (DLC-TiC) films produced by pulsed laser deposition
Dehnavi et al. Corrosion behaviour of electron beam melted Ti6Al4V: effects of microstructural variation
Singh et al. Assembly of tantalum porous films with graded oxidation profile from size-selected nanoparticles
Din et al. Accelerated growth of oxide film on aluminium alloys under steam: part I: effects of alloy chemistry and steam vapour pressure on microstructure
Zhou et al. Micro-arc oxidation for improving high-temperature oxidation resistance of additively manufacturing Ti2AlNb
Kajita et al. Fabrication of photocatalytically active vanadium oxide nanostructures via plasma route
Wu et al. Anti-corrosion layer prepared by plasma electrolytic carbonitriding on pure aluminum
Plank et al. Chemical tuning of PtC nanostructures fabricated via focused electron beam induced deposition
Liu et al. Spectroscopic investigation of plasma electrolytic borocarburizing on q235 low-carbon steel
Zemek et al. Amorphous carbon nanocomposite films doped by titanium: surface and sub-surface composition and bonding
Kamenetskih et al. Characterization of TiAlSiON coatings deposited by plasma enhanced magnetron sputtering: XRD, XPS, and DFT studies
Alov Surface oxidation of metals by oxygen ion bombardment
Wu et al. Cathodic plasma electrolysis for preparation of diamond-like carbon particles in glycerol solution
Xu et al. In situ XPS analysis of surface transformations in activated Ti-Zr-V thin films by nitrogen venting
Oliveira et al. Surface modification of NiTi by plasma based ion implantation for application in harsh environments
Tang et al. Methane and nitrogen plasma immersion ion implantation of titanium metal
Vlcak et al. Structural Characterization and Mechanical Properties of a Titanium Nitride‐Based Nanolayer Prepared by Nitrogen Ion Implantation on a Titanium Alloy
Rogov et al. RETRACTED: Porous germanium with copper nanoparticles formed by ion implantation
Kruhlov et al. Oxidation and reduction processes in Ni/Cu/Cr/Si (100) thin films under low-energy ion irradiation
Yankov et al. Reactive plasma immersion ion implantation for surface passivation