Zhu et al., 2012 - Google Patents
Bidirectional electrothermal actuator with Z-shaped beamsZhu et al., 2012
View PDF- Document ID
- 8521361945128991099
- Author
- Zhu Y
- Moheimani S
- Yuce M
- Publication year
- Publication venue
- IEEE Sensors Journal
External Links
Snippet
A bidirectional micro-actuator powered by electrothermal force is successfully demonstrated under both dc and ac operations, without the assistance of magnetic field, using MetalMUMPs process. To achieve small stiffness without buckling, which tends to occur in V …
- 230000002457 bidirectional 0 title abstract description 5
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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