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Yanagihara et al., 1995 - Google Patents

L-SHAPED BASE ELECTRODE WITH 0.5 μm CONTACT

Yanagihara et al., 1995

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Document ID
8327375635821419753
Author
Yanagihara M
Sakai H
Ota Y
Tanabe M
Tamura A
Publication year
Publication venue
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)

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We have developed a new fabrication process of HBTS with an L-shaped and narrow base electrode in order to reduce the product of the base-collector capacitance (CBC) and the base resistance (RB) for high fmax values. The L-shaped base electrode suppresses the …
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