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Martin et al., 2004 - Google Patents

InGaAs/InP focal plane arrays for visible light imaging

Martin et al., 2004

Document ID
7799218125123497081
Author
Martin T
Cohen M
Dries J
Lange M
Publication year
Publication venue
Infrared Technology and Applications XXX

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Snippet

We report on recent results in using InGaAs/InP focal plane arrays for visible light imaging. We have fabricated substrate-removed backside illuminated InGaAs/InP focal plane arrays down to a 10 μm pitch with high quantum efficiency from 0.4 μm through 1.7 μm. This focal …
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