[go: up one dir, main page]

Kodihalli Shivaprakash et al., 2019 - Google Patents

Fabrication of flexible polymer molds for polymer microstructuring by roll-to-roll hot embossing

Kodihalli Shivaprakash et al., 2019

View PDF @Full View
Document ID
7659606374936716248
Author
Kodihalli Shivaprakash N
Ferraguto T
Panwar A
Banerjee S
Barry C
Mead J
Publication year
Publication venue
ACS omega

External Links

Snippet

Roll-to-roll hot embossing could revolutionize the manufacturing of multifunctional polymer films with the ability to process large area at a high rate with reduced cost. The continuous hot embossing of the films, however, has been hindered due to the lack of durable and …
Continue reading at pubs.acs.org (PDF) (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Micro embossing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs, grooves
    • B29C33/424—Moulding surfaces provided with means for marking or patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process

Similar Documents

Publication Publication Date Title
Khang et al. Low-pressure nanoimprint lithography
Deshmukh et al. Recent developments in hot embossing–a review
Kodihalli Shivaprakash et al. Fabrication of flexible polymer molds for polymer microstructuring by roll-to-roll hot embossing
Zhang et al. Replica molding of high-aspect-ratio polymeric nanopillar arrays with high fidelity
Ahn et al. Large-area roll-to-roll and roll-to-plate nanoimprint lithography: a step toward high-throughput application of continuous nanoimprinting
Chien Micromolding of biochip devices designed with microchannels
Trimbach et al. Block copolymer thermoplastic elastomers for microcontact printing
Khang et al. Sub-100 nm patterning with an amorphous fluoropolymer mold
US20120000379A1 (en) Method for producing a stamp for hot embossing
Chien Hot embossing of microfluidic platform
Choi et al. Simple fabrication of asymmetric high-aspect-ratio polymer nanopillars by reusable AAO templates
Jiang et al. Lateral flow through a parallel gap driven by surface hydrophilicity and liquid edge pinning for creating microlens array
Deshmukh et al. Current innovations in roller embossing—A comprehensive review
Rahmanian et al. Microscale patterning of thermoplastic polymer surfaces by selective solvent swelling
Peng et al. Continuous roller nanoimprinting: next generation lithography
Stuart et al. Roll in and roll out: a path to high-throughput nanoimprint lithography
Tsao et al. Rapid polymer microchannel fabrication by hot roller embossing process
Okabe et al. Ultra-violet nanoimprint lithography-compatible positive-tone electron beam resist for 3D hybrid nanostructures
Pemg et al. Microfluidic chip fabrication using hot embossing and thermal bonding of COP
Chan-Park et al. Simulation and investigation of factors affecting high aspect ratio UV embossing
Bhandaru et al. Programmable nanopatterns by controlled debonding of soft elastic films
Zhu et al. Polymer shrinkage of hot embossed microstructures for higher aspect ratio and smaller size
Zhu et al. Hot embossing at viscous state to enhance filling process for complex polymer structures
del Campo et al. Generating micro-and nanopatterns on polymeric materials
Suh et al. Permeability-and surface-energy-tunable polyurethane acrylate molds for capillary force lithography