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Pauleau, 2008 - Google Patents

Residual stresses in DLC films and adhesion to various substrates

Pauleau, 2008

Document ID
7326900198798133648
Author
Pauleau Y
Publication year
Publication venue
Tribology of Diamond-Like Carbon Films: Fundamentals and Applications

External Links

Snippet

The origin of residual stresses in thin films and various models invoked to explain the development of such stresses are reviewed in the first part the chapter. Compressive intrinsic stresses develop in fully dense films such as diamond-like carbon (DLC) films …
Continue reading at link.springer.com (other versions)

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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/277—Diamond only using other elements in the gas phase besides carbon and hydrogen; using other elements besides carbon, hydrogen and oxygen in case of use of combustion torches; using other elements besides carbon, hydrogen and inert gas in case of use of plasma jets
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

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