[go: up one dir, main page]

Khanna et al., 2008 - Google Patents

Amorphous silicon optical waveguides and Bragg mirrors

Khanna et al., 2008

View PDF
Document ID
7256347422779583963
Author
Khanna A
Mulot M
Arpiainen S
Säynätjoki A
Ahopelto J
Honkanen S
Lipsanen H
Publication year
Publication venue
Silicon Photonics and Photonic Integrated Circuits

External Links

Snippet

We study 200 nm thick hydrogenated amorphous silicon (a-Si: H) optical strip waveguides fabricated by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique over PECVD silicon oxide on top of standard silicon wafer. The layer of a-Si: H is etched by …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/105—Light guides of the optical waveguide type having optical polarisation effects
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01S—DEVICES USING STIMULATED EMISSION
    • H01S3/00—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
    • H01S3/05—Construction or shape of optical resonators; Accomodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01S—DEVICES USING STIMULATED EMISSION
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feed-back lasers (DFB-lasers)
    • H01S5/125—Distributed Bragg reflector lasers (DBR-lasers)
    • G—PHYSICS
    • G02—OPTICS
    • G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/02—Optical fibre with cladding with or without a coating
    • G02B6/02057—Optical fibre with cladding with or without a coating comprising gratings
    • G02B6/02066—Gratings having a surface relief structure, e.g. repetitive variation in diameter of core or cladding
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01S—DEVICES USING STIMULATED EMISSION
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01S—DEVICES USING STIMULATED EMISSION
    • H01S3/00—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
    • H01S3/30—Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves using scattering effects, e.g. stimulated Brillouin or Raman effects

Similar Documents

Publication Publication Date Title
Rong et al. Low-threshold continuous-wave Raman silicon laser
Liu et al. Optical amplification and lasing by stimulated Raman scattering in silicon waveguides
Daldosso et al. Comparison among various Si/sub 3/N/sub 4/waveguide geometries grown within a CMOS fabrication pilot line
El Dirani et al. Crack-free silicon-nitride-on-insulator nonlinear circuits for continuum generation in the C-band
KR102592497B1 (en) Integrated optics-based external cavity laser configured for mode-hop-free wavelength tuning
Rafizadeh et al. Propagation loss measurements in semiconductor microcavity ring and disk resonators
Miarabbas Kiani et al. Lasing in a hybrid rare‐earth silicon microdisk
JP2008511862A (en) Lifetime reduction of generated carriers by two-photon absorption in semiconductor-based Raman lasers and amplifier semiconductor waveguides
Kim et al. Tunable transmission resonant filter and modulator with vertical gratings
US20220337021A1 (en) Integrated silicon structures with optical gain mediated by rare-earth-doped tellurium-oxide-coating
Nambiar et al. High-efficiency grating coupler in 400 nm and 500 nm PECVD silicon nitride with bottom reflector
Fardad et al. Hybrid sol-gel materials for integration of optoelectronic components
Lipka et al. Low-loss multilayer compatible a-Si: H optical thin films for photonic applications
Puckett et al. 422 million Q planar integrated all-waveguide resonator with a 3.4 billion absorption limited Q and sub-MHz linewidth
Jalali et al. Light generation, amplification, and wavelength conversion via stimulated Raman scattering in silicon microstructures
Khanna et al. Amorphous silicon optical waveguides and Bragg mirrors
Xu Polarization control in silicon photonic waveguide components using cladding stress engineering
Li Rare-earth-doped lasers on silicon photonics platforms
Säynätjoki et al. Characterization of photonic crystal waveguides using Fabry–Perot resonances
Tran Heterogeneous silicon/III-V photonic integration for ultralow noise semiconductor lasers
JP2007193033A (en) Wavelength conversion module, wavelength conversion light source, and wavelength conversion device
Samarelli Micro ring resonators in silicon-on-insulator
Rong et al. Monolithic integrated ring resonator Raman silicon laser and amplifier
Mu Active Passive Monolithic Platforms in Si3N4 Technology
Franken Integrated coherent sources from infra-red to ultra-violet