Skidmore et al., 2003 - Google Patents
Parallel assembly of microsystems using Si micro electro mechanical systemsSkidmore et al., 2003
View PDF- Document ID
- 6199350600384513315
- Author
- Skidmore G
- Ellis M
- Geisberger A
- Tsui K
- Saini R
- Huang T
- Randall J
- Publication year
- Publication venue
- Microelectronic engineering
External Links
Snippet
The remarkable advances in miniaturization have been achieved largely by the monolithic integration techniques developed by the integrated circuit industry. However, monolithic integration frequently results in compromised performance and for complete systems …
- 238000000034 method 0 abstract description 20
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICRO-STRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
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