Motamedi, 1994 - Google Patents
Acoustic sensor technologyMotamedi, 1994
- Document ID
- 5895799442897472816
- Author
- Motamedi M
- Publication year
- Publication venue
- 1994 IEEE MTT-S International Microwave Symposium Digest (Cat. No. 94CH3389-4)
External Links
Snippet
The recent development in monolithic devices has enabled a breakthrough in the applications of acoustic sensors in navigation and communications signal processing. A piezoelectric thin film material, such as ZnO, AlN or PZT, permits both acoustoelectric SAW …
- 238000005516 engineering process 0 title abstract description 11
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Kanno | Piezoelectric MEMS: Ferroelectric thin films for MEMS applications | |
| Melamud et al. | Temperature-insensitive composite micromechanical resonators | |
| Wenzel et al. | A multisensor employing an ultrasonic Lamb-wave oscillator | |
| Kim et al. | Design, fabrication and characterization of high temperature piezoelectric vibration sensor using YCOB crystals | |
| Danel et al. | Quartz: a material for microdevices | |
| KR102000774B1 (en) | Measurement method using a sensor; sensor system and sensor | |
| US7716986B2 (en) | Acoustic wave sensing device integrated with micro-channels and method for the same | |
| CN101258676B (en) | Device having piezoelectric acoustic resonance element, manufacturing method thereof, and method of outputting signal depending on resonance frequency | |
| Danel et al. | Micromachining of quartz and its application to an acceleration sensor | |
| GB2087558A (en) | Pressure transducer of vibrating element type | |
| Ferrari et al. | Development and application of mass sensors based on flexural resonances in alumina beams | |
| Hök et al. | Vibration analysis of micromechanical elements | |
| Motamedi | Acoustic sensor technology | |
| Liu et al. | Design and fabrication of a MEMS Lamb wave device based on ZnO thin film | |
| Korobova | Piezoelectric MEMS technologies | |
| US11716070B2 (en) | Film bulk acoustic sensors using thin LN-LT layer | |
| Danel et al. | Application of quartz micromachining to the realization of a pressure sensor | |
| Jia et al. | Improvement of Lamb waves sensors: Temperature sensitivity compensation | |
| Clayton et al. | Miniature crystalline quartz electromechanical structures | |
| Hoang | Design and realization of SAW pressure sensor using Aluminum Nitride | |
| Rivera | RF MEMS resonators for mass sensing applications | |
| Ivanov | Advanced sensors for multifunctional applications | |
| Yu et al. | A resonant high-pressure sensor based on six cavities | |
| CN100549689C (en) | Acoustic wave sensing device with integrated micro-channel, manufacturing method thereof and acoustic wave sensor | |
| Ferrari | Printed thick-film piezoelectric and pyroelectric sensors |