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CERN Accelerating science

Article
Title Total Ionizing Dose in Nano-Scaled CMOS Technologies
Related titleTotal Ionizing Dose in Nano-Scaled CMOS Technologies
Author(s) Faccio, Federico (CERN) ; Borghello, Giulio (CERN) ; Bonaldo, Stefano (U. Padua (main))
Publication 2025
Number of pages 32
In: IEEE Trans. Nucl. Sci. 72 (2025) 3247-3278
DOI 10.1109/TNS.2025.3593959
Subject category Nuclear Physics - Experiment
Abstract espite incredible technological advances in the fabrication of MOS transistors, the widespread use of isolation layers makes the total ionizing dose (TID) a persistent threat to the operation of these devices in ionizing radiation environments. This article provides a comprehensive review of the past three decades of research on the TID effects in transistors built across various scaled complementary metal-oxide-semiconductor (CMOS) nodes, ranging from a 1.6-μm planar MOS field-effect transistor (MOSFET) technology to FinFETs produced in a 16-nm node. The focus is on understanding the evolution of the TID effects with the scaling down, as different oxides and channel layouts are employed in the CMOS processes.
Copyright/License publication: © 2025 The Author(s) (License: CC-BY-4.0)

Corresponding record in: Inspire


 Record created 2025-11-04, last modified 2025-11-04


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