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Vineet Nair
Vineet Nair
Senior Member of Technical Staff
Verified email at micron.com
Title
Cited by
Cited by
Year
Textured nanoporous Mo:BiVO4 photoanodes with high charge transport and charge transfer quantum efficiencies for oxygen evolution
V Nair, C Perkins, Q Lin, M Law
Energy and Environmental Science, 2016
1772016
A study of the methane tolerance of LSCM–YSZ composite anodes with Pt, Ni, Pd and ceria catalysts
JS Kim, VV Nair, JM Vohs, RJ Gorte
Scripta Materialia 65 (2), 90-95, 2011
882011
Metal layer single EUV expose at pitch 28 nm: how bright field and NTD resist advantages align
JH Franke, A Frommhold, N Davydova, R Aubert, VV Nair, T Kovalevich, ...
Extreme Ultraviolet (EUV) Lithography XII 11609, 43-62, 2021
222021
Evaluation of Nanostructured β-Mn2V2O7 Thin Films as Photoanodes for Photoelectrochemical Water Oxidation
Y Gargasya, MK Gish, VV Nair, JC Johnson, M Law
Chemistry of Materials 33 (19), 7743-7754, 2021
122021
Tomorrow’s pitches on today’s 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes
JH Franke, N Davydova, J Bekaert, V Wiaux, VV Nair, A van Dijk, E Wang, ...
Extreme Ultraviolet Lithography 2020 11517, 115-127, 2021
122021
Study of EUV reticle storage effects through exposure on EBL2 and NXE
R Jonckheere, CC Wu, V de Rooij-Lohmann, D Elstgeest, H Lensen, ...
Extreme Ultraviolet Lithography 2020 11517, 78-90, 2020
122020
CNT pellicles: Imaging results of the first full-field EUV exposures
J Bekaert, E Gallagher, R Jonckheere, L Van Look, R Aubert, VV Nair, ...
Extreme Ultraviolet (EUV) Lithography XII 11609, 95-103, 2021
102021
Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures
J Bekaert, E Gallagher, R Jonckheere, L Van Look, R Aubert, VV Nair, ...
Journal of Micro/Nanopatterning, Materials, and Metrology 20 (2), 021005-021005, 2021
72021
Resistive switching of Al/Sol-Gel ZnO/Al devices for resistive random access memory applications
S Deshpande, VV Nair
2009 International Conference on Advances in Computing, Control, and …, 2009
72009
Accurate mapping of dose variations on EUV scanners using dose-to-clear exposures and optical ellipsometry
VV Nair, L Van Look, R Aubert, E Hendrickx
Extreme Ultraviolet Lithography 2020 11517, 29-39, 2020
62020
Enhanced EUV photolithography control for overcoming defectivity challenges
A Ohri, S Snyder, VV Nair, B Watson, K Ahn, ES Ege, Y Singh, E Lee, ...
International Conference on Extreme Ultraviolet Lithography 2024 13215, 164-168, 2024
42024
Novel monitoring of EUV litho cluster for manufacturing insertion
V Truffert, K Ausschnitt, VV Nair, K D'have
Extreme Ultraviolet (EUV) Lithography XI 11323, 192-204, 2020
42020
Impact of developer chemistry on EUV photolithography defects: PFAS vs. PFAS-free surfactants
A Ohri, VV Nair, D Pratt, S Light, B Watson, SK Vadivel
Advances in Patterning Materials and Processes XLII 13428, 578-582, 2025
12025
Impact of annealing temperature on DSA process: toward faster assembly kinetics
HS Suh, VV Nair, P Rincon Delgadillo, J Doise, G Lorusso, P Nealey, ...
12018
Overcoming throughput and defects tradeoffs in EUV photolithography for 2D patterning
A Ohri, L Hoffman, T Chou, VV Nair, S Light, J Hobbs, R Kothari, D Pratt, ...
International Conference on Extreme Ultraviolet Lithography 2025 13686, 275-284, 2025
2025
EUV mask lifetime evaluation using stochastic process window through mask clean cycles
VV Nair, D Kewley, G Yoon, RA Shoemake, B Yang, T Boettiger, ...
Optical and EUV Nanolithography XXXVIII 13424, 72-79, 2025
2025
Breaking down ADI line edge roughness from a DUV scanner into components
B Watson, T van Hemert, J van den Broeke, A Bouma, V Temchenko, ...
Optical and EUV Nanolithography XXXVIII 13424, 208-213, 2025
2025
Textured nanoporous Mo: BiVO
V Nair, CL Perkins, Q Lin
Energy Environ, 2016
2016
Enhanced Low Bias Performance in Textured BiVO4 Photoanodes through Halide and Phosphate Treatments
VV Nair, CL Perkins, M Law
Electrochemical Society Meeting Abstracts 227, 2009-2009, 2015
2015
Semiconductor photochemistry of BiVO4 photoanodes and sensitized wide gap p-type oxides for tandem water-splitting devices
VV Nair
University of California, Irvine, 2015
2015
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Articles 1–20