| Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas A Annušová, D Marinov, JP Booth, N Sirse, ML Da Silva, B Lopez, ... Plasma Sources Science and Technology 27 (4), 045006, 2018 | 86 | 2018 |
| Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma S Sharma, N Sirse, PK Kaw, MM Turner, AR Ellingboe Physics of Plasmas 23 (11), 2016 | 69 | 2016 |
| Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge S Sharma, N Sirse, MM Turner, AR Ellingboe Physics of Plasmas 25 (6), 2018 | 65 | 2018 |
| Surface loss rates of H and Cl radicals in an inductively coupled plasma etcher derived from time-resolved electron density and optical emission measurements GA Curley, L Gatilova, S Guilet, S Bouchoule, GS Gogna, N Sirse, ... Journal of Vacuum Science & Technology A 28 (2), 360-372, 2010 | 53 | 2010 |
| Electric field filamentation and higher harmonic generation in very high frequency capacitive discharges S Sharma, N Sirse, A Sen, JS Wu, MM Turner Journal of Physics D: Applied Physics 52 (36), 365201, 2019 | 52 | 2019 |
| Plasma density and ion energy control via driving frequency and applied voltage in a collisionless capacitively coupled plasma discharge S Sharma, A Sen, N Sirse, MM Turner, AR Ellingboe Physics of Plasmas 25 (8), 2018 | 52 | 2018 |
| Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency S Sharma, N Sirse, A Kuley, MM Turner Plasma Sources Science and Technology 29 (4), 045003, 2020 | 42 | 2020 |
| Absolute atomic chlorine densities in a Cl2 inductively coupled plasma determined by two-photon laser-induced fluorescence with a new calibration method JP Booth, Y Azamoum, N Sirse, P Chabert Journal of Physics D: Applied Physics 45 (19), 195201, 2012 | 39 | 2012 |
| Using the resonance hairpin probe and pulsed photodetachment technique as a diagnostic for negative ions in oxygen plasma J Conway, N Sirse, SK Karkari, MM Turner Plasma Sources Science and Technology 19 (6), 065002, 2010 | 39 | 2010 |
| Plasma asymmetry and electron and ion energy distribution function in capacitive discharges excited by tailored waveforms S Sharma, N Sirse, A Kuley, MM Turner Journal of Physics D: Applied Physics 55 (27), 275202, 2022 | 37 | 2022 |
| High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform S Sharma, N Sirse, MM Turner Plasma Sources Science and Technology 29 (11), 114001, 2020 | 36 | 2020 |
| Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities S Sharma, N Sirse, A Kuley, A Sen, MM Turner Journal of Physics D: Applied Physics 54 (5), 055205, 2020 | 35 | 2020 |
| Influence of select discharge parameters on electric field transients triggered in collisionless very high frequency capacitive discharges S Sharma, N Sirse, A Sen, MM Turner, AR Ellingboe Physics of Plasmas 26 (10), 2019 | 34 | 2019 |
| Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform S Sharma, N Sirse, A Kuley, MM Turner Physics of Plasmas 28 (10), 2021 | 31 | 2021 |
| Characteristics of silicon nitride deposited by VHF (162 MHz)-plasma enhanced chemical vapor deposition using a multi-tile push–pull plasma source KS Kim, N Sirse, KH Kim, AR Ellingboe, KN Kim, GY Yeom Journal of Physics D: Applied Physics 49 (39), 395201, 2016 | 27 | 2016 |
| Resonance hairpin and Langmuir probe-assisted laser photodetachment measurements of the negative ion density in a pulsed dc magnetron discharge JW Bradley, R Dodd, SD You, N Sirse, SK Karkari Journal of Vacuum Science & Technology A 29 (3), 2011 | 27 | 2011 |
| Collisionless sheath heating in current-driven capacitively coupled plasma discharges via higher order sinusoidal signals S Sharma, SK Mishra, PK Kaw, A Das, N Sirse, MM Turner Plasma Sources Science and Technology 24 (2), 025037, 2015 | 26 | 2015 |
| The temporal evolution in plasma potential during laser photo-detachment used to diagnose electronegative plasma N Sirse, SK Karkari, MA Mujawar, J Conway, MM Turner Plasma Sources Science and Technology 20 (5), 055003, 2011 | 26 | 2011 |
| Numerical experiment to estimate the validity of negative ion diagnostic using photo-detachment combined with Langmuir probing N Oudini, N Sirse, R Benallal, F Taccogna, A Aanesland, A Bendib, ... Physics of Plasmas 22 (7), 2015 | 25 | 2015 |
| Probing negative ion density and temperature using a resonance hairpin probe N Sirse, SK Karkari, MM Turner Plasma Sources Science and Technology 24 (2), 022001, 2015 | 25 | 2015 |
