| Monolithically integrated thermoelectric energy harvester based on silicon nanowire arrays for powering micro/nanodevices D Dávila, A Tarancon, C Calaza, M Salleras, M Fernández-Regúlez, ... Nano energy 1 (6), 812-819, 2012 | 148 | 2012 |
| Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques RMR Pinto, V Gund, C Calaza, KK Nagaraja, KB Vinayakumar Microelectronic Engineering 257, 111753, 2022 | 108 | 2022 |
| SiGe nanowire arrays based thermoelectric microgenerator ID Noyan, G Gadea, M Salleras, M Pacios, C Calaza, A Stranz, M Dolcet, ... Nano Energy 57, 492-499, 2019 | 101 | 2019 |
| Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor G Gadea, A Morata, JD Santos, D Dávila, C Calaza, M Salleras, ... Nanotechnology 26 (19), 195302, 2015 | 53 | 2015 |
| Silicon nanowire arrays as thermoelectric material for a power microgenerator D Dávila, A Tarancón, M Fernández-Regúlez, C Calaza, M Salleras, ... Journal of Micromechanics and Microengineering 21 (10), 104007, 2011 | 50 | 2011 |
| An uncooled infrared focal plane array for low-cost applications fabricated with standard CMOS technology C Calaza, N Viarani, G Pedretti, M Gottardi, A Simoni, V Zanini, M Zen Sensors and Actuators A: Physical 132 (1), 129-138, 2006 | 46 | 2006 |
| Smart integration of silicon nanowire arrays in all-silicon thermoelectric micro-nanogenerators L Fonseca, JD Santos, A Roncaglia, D Narducci, C Calaza, M Salleras, ... Semiconductor Science and Technology 31 (8), 084001, 2016 | 45 | 2016 |
| All-silicon thermoelectric micro/nanogenerator including a heat exchanger for harvesting applications ID Noyan, M Dolcet, M Salleras, A Stranz, C Calaza, G Gadea, M Pacios, ... Journal of Power Sources 413, 125-133, 2019 | 44 | 2019 |
| Surface texture detection with a new sub-mm resolution flexible tactile capacitive sensor array for multimodal artificial finger E Sotgiu, DE Aguiam, C Calaza, J Rodrigues, J Fernandes, B Pires, ... Journal of Microelectromechanical Systems 29 (5), 629-636, 2020 | 38 | 2020 |
| Low temperature humidity sensor based on Ge nanowires selectively grown on suspended microhotplates J Samà, MS Seifner, G Domènech-Gil, J Santander, C Calaza, M Moreno, ... Sensors and Actuators B: Chemical 243, 669-677, 2017 | 35 | 2017 |
| A surface micromachining process for the development of a medium-infrared tuneable Fabry–Perot interferometer C Calaza, L Fonseca, M Moreno, S Marco, C Cané, I Gracia Sensors and Actuators A: Physical 113 (1), 39-47, 2004 | 35 | 2004 |
| Electrical transport properties of V2O5 thin films obtained by thermal annealing of layers grown by RF magnetron sputtering at room temperature HMR Giannetta, C Calaza, DG Lamas, L Fonseca, L Fraigi Thin Solid Films 589, 730-734, 2015 | 34 | 2015 |
| Planar thermoelectric microgenerators based on silicon nanowires D Dávila, A Tarancón, D Kendig, M Fernández-Regúlez, N Sabaté, ... Journal of electronic materials 40 (5), 851-855, 2011 | 34 | 2011 |
| Finite-element analysis of a miniaturized ion mobility spectrometer for security applications R Cumeras, I Gràcia, E Figueras, L Fonseca, J Santander, M Salleras, ... Sensors and Actuators B: Chemical 170, 13-20, 2012 | 32 | 2012 |
| Electromechanical characterization of low actuation voltage RF MEMS capacitive switches based on DC CV measurements C Calaza, B Margesin, F Giacomozzi, K Rangra, V Mulloni Microelectronic engineering 84 (5-8), 1358-1362, 2007 | 32 | 2007 |
| A micromachined thermoelectric sensor for natural gas analysis: Multivariate calibration results S Udina, M Carmona, A Pardo, C Calaza, J Santander, L Fonseca, ... Sensors and Actuators B: Chemical 166, 338-348, 2012 | 28 | 2012 |
| Qualitative and quantitative substance discrimination using a CMOS compatible non-specific NDIR microarray L Fonseca, R Rubio, J Santander, C Calaza, N Sabaté, P Ivanov, ... Sensors and Actuators B: Chemical 141 (2), 396-403, 2009 | 27 | 2009 |
| Improved thermal behavior of multiple linked arrays of silicon nanowires integrated into planar thermoelectric microgenerators D Dávila, A Tarancón, C Calaza, M Salleras, M Fernández-Regúlez, ... Journal of electronic materials 42 (7), 1918-1925, 2013 | 25 | 2013 |
| New approach for batch microfabrication of silicon-based micro fuel cells N Sabaté, JP Esquivel, J Santander, JG Hauer, RW Verjulio, I Gràcia, ... Microsystem technologies 20 (2), 341-348, 2014 | 24 | 2014 |
| A wide tuning range MEMS varactor based on a toggle push-pull mechanism P Farinelli, F Solazzi, C Calaza, B Margesin, R Sorrentino 2008 European Microwave Integrated Circuit Conference, 474-477, 2008 | 24 | 2008 |
Luis Fonseca ORCID:0000-0002-1394...IMB-CNM (CSIC)Verified email at imb-cnm.csic.es
