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Charith Eranga Nanayakkara
Charith Eranga Nanayakkara
Senior Scientist, EMD Performance Materials
Verified email at emdgroup.com
Title
Cited by
Cited by
Year
Titanium dioxide photocatalysis in atmospheric chemistry
H Chen, CE Nanayakkara, VH Grassian
Chemical reviews 112 (11), 5919-5948, 2012
9382012
Sulfur dioxide adsorption and photooxidation on isotopically-labeled titanium dioxide nanoparticle surfaces: roles of surface hydroxyl groups and adsorbed water in the …
CE Nanayakkara, J Pettibone, VH Grassian
Physical Chemistry Chemical Physics 14 (19), 6957-6966, 2012
1382012
Titanium Dioxide Nanoparticle Surface Reactivity with Atmospheric Gases, CO2, SO2, and NO2: Roles of Surface Hydroxyl Groups and Adsorbed Water in the …
CE Nanayakkara, WA Larish, VH Grassian
The Journal of Physical Chemistry C 118 (40), 23011-23021, 2014
1222014
Surface Photochemistry of Adsorbed Nitrate: The Role of Adsorbed Water in the Formation of Reduced Nitrogen Species on α-Fe2O3 Particle Surfaces
CE Nanayakkara, PM Jayaweera, G Rubasinghege, J Baltrusaitis, ...
The Journal of Physical Chemistry A 118 (1), 158-166, 2014
1012014
Enhancing the reactivity of Al/CuO nanolaminates by Cu incorporation at the interfaces
L Marín, CE Nanayakkara, JF Veyan, B Warot-Fonrose, S Joulie, A Estève, ...
ACS Applied Materials & Interfaces 7 (22), 11713-11718, 2015
902015
Surface Adsorption and Photochemistry of Gas-Phase Formic Acid on TiO2 Nanoparticles: The Role of Adsorbed Water in Surface Coordination, Adsorption …
CE Nanayakkara, JK Dillon, VH Grassian
The Journal of Physical Chemistry C 118 (44), 25487-25495, 2014
692014
Atomic Layer Deposition of Silicon Dioxide Using Aminosilanes Di-sec-butylaminosilane and Bis(tert-butylamino)silane with Ozone
LF Pena, CE Nanayakkara, A Mallikarjunan, H Chandra, M Xiao, X Lei, ...
The Journal of Physical Chemistry C 120 (20), 10927-10935, 2016
602016
Role of initial precursor chemisorption on incubation delay for molybdenum oxide atomic layer deposition
CE Nanayakkara, A Vega, G Liu, CL Dezelah, RK Kanjolia, YJ Chabal
Chemistry of Materials 28 (23), 8591-8597, 2016
372016
Selective Atomic Layer Deposition Mechanism for Titanium Dioxide Films with (EtCp)Ti(NMe2)3: Ozone versus Water
JP Klesko, R Rahman, A Dangerfield, CE Nanayakkara, T L’Esperance, ...
Chemistry of Materials 30 (3), 970-981, 2018
322018
Low-index, smooth Al2O3 films by aqueous solution process
CK Perkins, RH Mansergh, JC Ramos, CE Nanayakkara, DH Park, ...
Optical Materials Express 7 (1), 273-280, 2016
252016
In situ infrared absorption study of plasma-enhanced atomic layer deposition of silicon nitride
LF Peña, EC Mattson, CE Nanayakkara, KA Oyekan, A Mallikarjunan, ...
Langmuir 34 (8), 2619-2629, 2018
142018
Aqueous process to limit hydration of thin-film inorganic oxides
CK Perkins, RH Mansergh, DH Park, CE Nanayakkara, JC Ramos, ...
Solid State Sciences 61, 106-110, 2016
112016
Basic mechanisms of Al interaction with the ZnO surface
Y Gao, L Marin, EC Mattson, J Cure, CE Nanayakkara, JF Veyan, ...
The Journal of Physical Chemistry C 121 (23), 12780-12788, 2017
102017
Role of Trimethylaluminum in low temperature atomic layer deposition of silicon nitride
A Dangerfield, CE Nanayakkara, A Mallikarjunan, X Lei, RM Pearlstein, ...
Chemistry of Materials 29 (14), 6022-6029, 2017
72017
Reaction mechanisms of the atomic layer deposition of tin oxide thin films using tributyltin ethoxide and ozone
CE Nanayakkara, G Liu, A Vega, CL Dezelah, RK Kanjolia, YJ Chabal
Langmuir 33 (24), 5998-6004, 2017
72017
Multi process air gap formation
J Hautala, C NANAYAKKARA
US Patent 12,183,627, 2024
22024
Method of forming structure including a doped adhesion film
MB Mousa, J Kim, CE Nanayakkara, P Ma, CD Wang, YC Byun, J Wrench, ...
US Patent App. 18/141,694, 2023
12023
Etch back for enhanced directional deposition
Z Huang, C NANAYAKKARA, S Bhatia, M Sachan, J Hautala
US Patent App. 19/213,874, 2025
2025
Compounds and methods for selectively forming metal-containing films
C NANAYAKKARA, E Joby, J Woodruff, C DEZELAH, SS HONG, ...
US Patent 12,297,537, 2025
2025
Method for depositing layers directly adjacent uncovered vias or contact holes
J Hautala, C NANAYAKKARA
US Patent 12,255,067, 2025
2025
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