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Petro Deminskyi
Petro Deminskyi
ASM Microchemistry Oy, Finland
Verified email at asm.com
Title
Cited by
Cited by
Year
Atomic layer deposition of InN using trimethylindium and ammonia plasma
P Deminskyi, P Rouf, IG Ivanov, H Pedersen
Journal of Vacuum Science & Technology A 37 (2), 2019
542019
Area-selective atomic layer deposition using an inductively coupled plasma polymerized fluorocarbon layer: a case study for metal oxides
A Haider, P Deminskyi, TM Khan, H Eren, N Biyikli
The Journal of Physical Chemistry C 120 (46), 26393-26401, 2016
472016
Nanoscale selective area atomic layer deposition of TiO2 using e-beam patterned polymers
HENB Ali Haider, Mehmet Yilmaz, Petro Deminskyi
RSC Adv. 6, 106109-106119, 2016
462016
Self-aligned nanoscale processing solutions via selective atomic layer deposition of oxide, nitride, and metallic films
N Biyikli, A Haider, P Deminskyi, M Yilmaz
Low-Dimensional Materials and Devices 2017 10349, 30-49, 2017
242017
NLL-assisted multilayer graphene patterning
E Kovalska, I Pavlov, P Deminskyi, A Baldycheva, FO Ilday, C Kocabas
ACS omega 3 (2), 1546-1554, 2018
202018
Direct epitaxial nanometer-thin InN of high structural quality on 4H–SiC by atomic layer deposition
CW Hsu, P Deminskyi, I Martinovic, IG Ivanov, J Palisaitis, H Pedersen
Applied Physics Letters 117 (9), 2020
162020
Surface ligand removal in atomic layer deposition of GaN using triethylgallium
P Deminskyi, CW Hsu, B Bakhit, P Rouf, H Pedersen
Journal of Vacuum Science & Technology A 39 (1), 2021
132021
Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition
A Haider, P Deminskyi, M Yilmaz, K Elmabruk, I Yilmaz, N Biyikli
Journal of Materials Chemistry C 6 (24), 6471-6482, 2018
122018
Atomic layer deposition of molybdenum carbide thin films
PR Kärkkäinen, G Popov, T Hatanpää, A Kemppinen, K Kohopää, ...
Advanced Materials Interfaces 11 (26), 2400270, 2024
112024
Resolving impurities in atomic layer deposited aluminum nitride through low cost, high efficiency precursor design
SC Buttera, P Rouf, P Deminskyi, NJ O’Brien, H Pedersen, ST Barry
Inorganic Chemistry 60 (15), 11025-11031, 2021
92021
On the dynamics in chemical vapor deposition of InN
CW Hsu, P Deminskyi, A Persson, M Karlsson, H Pedersen
Journal of Applied Physics 130 (13), 2021
82021
Area-selective atomic layer deposition of noble metals: Polymerized fluorocarbon layers as effective growth inhibitors
P Deminskyi, A Haider, H Eren, TM Khan, N Biyikli
Journal of Vacuum Science & Technology A 39 (2), 2021
82021
Molybdenum nitride as a scalable and thermally stable pWFM for CFET
H Arimura, S Brus, J Franco, Y Oniki, A Vandooren, T Conard, BT Chan, ...
2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and …, 2023
52023
Graphene as plasma-compatible blocking layer material for area-selective atomic layer deposition: A feasibility study for III-nitrides
P Deminskyi, A Haider, E Kovalska, N Biyikli
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 36 (1 …, 2018
52018
Low-Dimensional Materials and Devices 2017
N Biyikli, A Haider, P Deminskyi, M Yilmaz, NP Kobayashi, AA Talin, ...
International Society for Optics and Photonics, 103490M, 2017
42017
Photoluminescence spectrums of GaN/InGaN MQDs on GaN nanoroads
OL P. Deminskyi, V. Osinsky, N. Lyahova, V. Hlotov, N. Sukhovyy
Uchionnye zapiski fizicheskogo fakulteta MGU, 142304, 2014
4*2014
Atomic layer deposition of AlN on different SiC surfaces
M Beshkova, P Deminskyi, CW Hsu, I Shtepliuk, I Avramova, R Yakimova, ...
Journal of Physics: Conference Series 2240 (1), 012004, 2022
32022
Laser writing of nanostructures deep inside Gallium Arsenide (GaAs)
O Tokel, A Turnali, P Deminskyi, S Ilday, FÖ Ilday
Conference on Lasers and Electro-Optics/Pacific Rim, W1E. 2, 2018
32018
Investigation of native oxide removing from HCPA ALD grown GaN thin films surface utilizing HF solutions
P Deminskyi, A Haider, N Biyikli, A Ovsianitsky, A Tsymbalenko, D Kotov, ...
2016 IEEE 36th International Conference on Electronics and Nanotechnology …, 2016
32016
Method of forming structures for threshold voltage control
M Van Druenen, C DEZELAH, Q Xie, P Deminskyi, GA Verni, RJ Chang, ...
US Patent 12,159,788, 2024
22024
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Articles 1–20