| Scatterometry—fast and robust measurements of nano-textured surfaces MH Madsen, PE Hansen Surface Topography: Metrology and Properties 4 (2), 023003, 2016 | 131 | 2016 |
| Accounting for PDMS shrinkage when replicating structures MH Madsen, NA Feidenhans, PE Hansen, J Garnæs, K Dirscherl Journal of Micromechanics and Microengineering 24 (12), 127002, 2014 | 121 | 2014 |
| Comparison of optical methods for surface roughness characterization NA Feidenhans, PE Hansen, L Pilný, MH Madsen, G Bissacco, ... Measurement Science and Technology 26 (8), 085208, 2015 | 69 | 2015 |
| Plasmonic color metasurfaces fabricated by a high speed roll-to-roll method S Murthy, H Pranov, NA Feidenhans, JS Madsen, PE Hansen, ... Nanoscale 9 (37), 14280-14287, 2017 | 53 | 2017 |
| Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy J Garnaes, PE Hansen, N Agersnap, J Holm, F Borsetto, A Kühle Applied optics 45 (14), 3201-3212, 2006 | 50 | 2006 |
| Survey of models for acquiring the optical properties of translucent materials JR Frisvad, SA Jensen, JS Madsen, A Correia, L Yang, SKS Gregersen, ... Computer graphics forum 39 (2), 729-755, 2020 | 48 | 2020 |
| Imaging scatterometry for flexible measurements of patterned areas MH Madsen, PE Hansen Optics express 24 (2), 1109-1117, 2016 | 42 | 2016 |
| Deep-reactive ion etching of silicon nanowire arrays at cryogenic temperatures J Xu, AD Refino, A Delvallée, S Seibert, C Schwalb, PE Hansen, ... Applied Physics Reviews 11 (2), 2024 | 38 | 2024 |
| Fast characterization of moving samples with nano-textured surfaces MH Madsen, PE Hansen, M Zalkovskij, M Karamehmedović, J Garnæs Optica 2 (4), 301-306, 2015 | 32 | 2015 |
| First steps towards a scatterometry reference standard B Bodermann, PE Hansen, S Burger, MA Henn, H Gross, M Bär, ... Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and …, 2012 | 21 | 2012 |
| Room temperature adsorption of Cs on Si (111)-(7× 7) studied by optical second-harmonic generation PE Hansen, K Pedersen, L Liu, P Morgen Surface science 391 (1-3), 252-259, 1997 | 21 | 1997 |
| Influence of annealing and deformation on optical properties of ultra precision diamond turned and anodized 6060 aluminium alloy N Tabrizian, HN Hansen, PE Hansen, R Ambat, P Møller Surface and Coatings Technology 204 (16-17), 2632-2638, 2010 | 18 | 2010 |
| Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing E Agocs, B Bodermann, S Burger, G Dai, J Endres, PE Hansen, L Nielson, ... Nanoengineering: fabrication, properties, optics, and devices XII 9556, 153-164, 2015 | 17 | 2015 |
| Steerable photonic jet for super-resolution microscopy M Karamehmedović, K Scheel, F Listov-Saabye Pedersen, A Villegas, ... Optics Express 30 (23), 41757-41773, 2022 | 16 | 2022 |
| Combined optimization and hybrid scalar–vector diffraction method for grating topography parameters determination PE Hansen, L Nielsen Materials Science and Engineering: B 165 (3), 165-168, 2009 | 16 | 2009 |
| Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures PE Hansen, MH Madsen, J Lehtolahti, L Nielsen Applied Surface Science 421, 471-479, 2017 | 14 | 2017 |
| Replacing libraries in scatterometry JSM Madsen, SA Jensen, J Nygård, PE Hansen Optics Express 26 (26), 34622-34632, 2018 | 13 | 2018 |
| Application of the method of auxiliary sources to a defect-detection inverse problem of optical diffraction microscopy M Karamehmedović, MP Sørensen, PE Hansen, AV Lavrinenko Journal of the European Optical Society-Rapid Publications 5, 10021, 2010 | 13 | 2010 |
| True-to-size surface mapping with neutral helium atoms SM Lambrick, A Salvador Palau, PE Hansen, G Bracco, J Ellis, AP Jardine, ... Physical Review A 103 (5), 053315, 2021 | 12 | 2021 |
| Profile estimation for Pt submicron wire on rough Si substrate from experimental data M Karamehmedović, PE Hansen, K Dirscherl, E Karamehmedović, ... Optics Express 20 (19), 21678-21686, 2012 | 12 | 2012 |
Mirza KaramehmedovićAssociate Professor, Technical University of DenmarkVerified email at dtu.dk
