[go: up one dir, main page]

Follow
Rami Khazaka
Rami Khazaka
Principal Technologist at ASM
Verified email at polytechnique.edu - Homepage
Title
Cited by
Cited by
Year
Methods of forming silicon germanium structures
R KHAZAKA, LPB Lima
US Patent 11,688,603, 2023
3152023
GeSn lasers covering a wide wavelength range thanks to uniaxial tensile strain
J Chrétien, N Pauc, F Armand Pilon, M Bertrand, QM Thai, L Casiez, ...
ACS photonics 6 (10), 2462-2469, 2019
1732019
Characterization of nanosilver dry films for high-temperature applications
R Khazaka, B Thollin, L Mendizabal, D Henry, R Hanna
IEEE Transactions on Device and Materials Reliability 15 (2), 149-155, 2015
292015
Growth and characterization of SiGeSn pseudomorphic layers on 200 mm Ge virtual substrates
R Khazaka, E Nolot, J Aubin, JM Hartmann
Semiconductor Science and Technology 33 (12), 124011, 2018
222018
Contact resistivity of highly doped Si: P, Si: As, and Si: P: As Epi layers for source/drain epitaxy
E Rosseel, C Porret, AY Hikavyy, R Loo, M Tirrito, B Douhard, O Richard, ...
ECS Transactions 98 (5), 37, 2020
212020
Silver versus white sheet as a back reflector for microcrystalline silicon solar cells deposited on LPCVD‐ZnO electrodes of various textures
R Khazaka, E Moulin, M Boccard, L Garcia, S Hänni, FJ Haug, F Meillaud, ...
Progress in Photovoltaics: Research and Applications 23 (9), 1182-1189, 2015
212015
Epitaxial growth of Ga-doped SiGe for reduction of contact resistance in finFET source/drain materials
J Margetis, D Kohen, C Porret, L Lima, R Khazaka, G Rengo, R Loo, ...
ECS Transactions 93 (1), 7, 2019
152019
Direct insight into grains formation in Si layers grown on 3C-SiC by chemical vapor deposition
R Khazaka, M Portail, P Vennéguès, D Alquier, JF Michaud
Acta Materialia 98, 336-342, 2015
152015
Low temperature source/drain epitaxy and functional silicides: essentials for ultimate contact scaling
C Porret, JL Everaert, M Schaekers, LA Ragnarsson, A Hikavyy, ...
2022 International Electron Devices Meeting (IEDM), 34.1. 1-34.1. 4, 2022
142022
Mid-infrared GeSn-based LEDs with Sn content up to 16%
M Bertrand, N Pauc, QM Thai, J Chrétien, L Casiez, A Quintero, ...
2019 IEEE 16th International Conference on Group IV Photonics (GFP), 1-2, 2019
132019
Toward high-quality 3C–SiC membrane on a 3C–SiC pseudo-substrate
R Khazaka, E Bahette, M Portail, D Alquier, JF Michaud
Materials Letters 160, 28-30, 2015
122015
Investigation of the growth of Si-Ge-Sn pseudomorphic layers on 200 mm Ge virtual substrates: impact of growth pressure, HCl and Si2H6 flows
R Khazaka, J Aubin, E Nolot, JM Hartmann
ECS Transactions 86 (7), 207, 2018
92018
Vertical GeSn electro-absorption modulators grown on Silicon for the mid-infrared
M Bertrand, L Casiez, A Quintero, J Chrétien, N Pauc, QM Thai, ...
2020 IEEE Photonics Conference (IPC), 1-2, 2020
82020
Silicon Growth on 3C-SiC (001)/Si (001): Pressure Influence and Thermal Effect
R Khazaka, M Portail, P Vennéguès, M Zielinski, T Chassagne, D Alquier, ...
Materials Science Forum 821, 978-981, 2015
72015
Source/Drain Epitaxy for Nanosheet-Based CFET Devices
E Rosseel, C Porret, T Dursap, R Loo, H Mertens, J Ganguly, R Sarkar, ...
ECS Transactions 114 (2), 29, 2024
62024
300 mm Wafer-scale In-situ CVD Growth Achieving 5.1×10-10 Ω-cm2 P-Type Contact Resistivity: Record 2.5×1021 cm-3 Active Doping and Demonstration on …
H Xu, R Khazaka, J Zhang, Z Zheng, Y Chen, X Gong
2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and …, 2022
62022
Ultra-low Specific Contact Resistivity (3.2×10-10 Ω-cm2) of Ti/Si0.5Ge0.5 Contact: Deep Insights into the Role of Interface Reaction and Ga Co-doping
H Xu, X Wang, S Luo, J Zhang, K Han, C Sun, C Wang, R Khazaka, Q Xie, ...
2021 Symposium on VLSI Technology, 1-2, 2021
62021
Realization of minimum number of rotational domains in heteroepitaxied Si(110) on 3C-SiC(001)
R Khazaka, M Grundmann, M Portail, P Vennéguès, M Zielinski, ...
Applied Physics Letters 108 (1), 011608, 2016
62016
Low Temperature Selective Epitaxy of Group-IV Semiconductors for Nanoelectronics
R Khazaka, B Marozas, W Kim, M Givens
ECS Transactions 109 (4), 87, 2022
52022
B and Ga Co-Doped Si1− xGex for p-Type Source/Drain Contacts
G Rengo, C Porret, A Hikavyy, E Rosseel, M Ayyad, RJH Morris, ...
ECS Journal of Solid State Science and Technology 11 (2), 024008, 2022
52022
The system can't perform the operation now. Try again later.
Articles 1–20