| From the bottom-up: toward area-selective atomic layer deposition with high selectivity AJM Mackus, MJM Merkx, WMM Kessels Chemistry of Materials 31 (1), 2-12, 2018 | 504 | 2018 |
| The use of atomic layer deposition in advanced nanopatterning AJM Mackus, AA Bol, WMM Kessels Nanoscale 6 (19), 10941-10960, 2014 | 495 | 2014 |
| Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review AJM Mackus, JR Schneider, C MacIsaac, JG Baker, SF Bent Chemistry of Materials 31 (4), 1142-1183, 2018 | 303 | 2018 |
| Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ... ACS nano 11 (9), 9303-9311, 2017 | 242 | 2017 |
| Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition MJ Weber, AJM Mackus, MA Verheijen, C van der Marel, WMM Kessels Chemistry of Materials 24 (15), 2973-2977, 2012 | 196 | 2012 |
| Remote plasma ALD of platinum and platinum oxide films HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ... Electrochemical and Solid-State Letters 12 (7), G34, 2009 | 178 | 2009 |
| Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis AJM Mackus, MA Verheijen, N Leick, AA Bol, WMM Kessels Chemistry of Materials 25 (9), 1905-1911, 2013 | 168 | 2013 |
| Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ... Applied Physics Letters 95 (1), 2009 | 168 | 2009 |
| Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum AJM Mackus, N Leick, L Baker, WMM Kessels Chemistry of Materials 24 (10), 1752-1761, 2012 | 155 | 2012 |
| Area-selective atomic layer deposition of metal oxides on noble metals through catalytic oxygen activation JA Singh, NFW Thissen, WH Kim, H Johnson, WMM Kessels, AA Bol, ... Chemistry of Materials 30 (3), 663-670, 2018 | 144 | 2018 |
| Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma L Baker, AS Cavanagh, D Seghete, SM George, AJM Mackus, ... Journal of Applied Physics 109 (8), 2011 | 135 | 2011 |
| Area-selective deposition of ruthenium by combining atomic layer deposition and selective etching MFJ Vos, SN Chopra, MA Verheijen, JG Ekerdt, S Agarwal, WMM Kessels, ... Chemistry of Materials 31 (11), 3878-3882, 2019 | 132 | 2019 |
| A process for topographically selective deposition on 3D nanostructures by ion implantation WH Kim, FS Minaye Hashemi, AJM Mackus, J Singh, Y Kim, ... ACS nano 10 (4), 4451-4458, 2016 | 127 | 2016 |
| Atomic layer deposition of Pd and Pt nanoparticles for catalysis: on the mechanisms of nanoparticle formation AJM Mackus, MJ Weber, NFW Thissen, D Garcia-Alonso, RHJ Vervuurt, ... Nanotechnology 27 (3), 034001, 2015 | 126 | 2015 |
| Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition A Mameli, B Karasulu, MA Verheijen, B Barcones, B Macco, AJM Mackus, ... Chemistry of Materials 31 (4), 1250-1257, 2019 | 108 | 2019 |
| Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ... Journal of Applied Physics 102 (8), 2007 | 108 | 2007 |
| Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ... Journal of Vacuum Science & Technology A 28 (1), 77-87, 2010 | 106 | 2010 |
| Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition AJM Mackus, JJL Mulders, MCM Van De Sanden, WMM Kessels Journal of Applied Physics 107 (11), 2010 | 104 | 2010 |
| Area-Selective Atomic Layer Deposition of Two-Dimensional WS2 Nanolayers S Balasubramanyam, MJM Merkx, MA Verheijen, WMM Kessels, ... ACS Materials Letters 2 (5), 511-518, 2020 | 100 | 2020 |
| Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide AJM Mackus, C MacIsaac, WH Kim, SF Bent The Journal of Chemical Physics 146 (5), 2017 | 97 | 2017 |
