WO2018190197A1 - シースヒータ - Google Patents
シースヒータ Download PDFInfo
- Publication number
- WO2018190197A1 WO2018190197A1 PCT/JP2018/014259 JP2018014259W WO2018190197A1 WO 2018190197 A1 WO2018190197 A1 WO 2018190197A1 JP 2018014259 W JP2018014259 W JP 2018014259W WO 2018190197 A1 WO2018190197 A1 WO 2018190197A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heating wire
- sheath
- sheath heater
- metal sheath
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
- H05B3/48—Heating elements having the shape of rods or tubes non-flexible heating conductor embedded in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/03—Electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/18—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being embedded in an insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/78—Heating arrangements specially adapted for immersion heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/014—Heaters using resistive wires or cables not provided for in H05B3/54
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/021—Heaters specially adapted for heating liquids
Definitions
- the present invention relates to a sheath heater.
- it relates to a thin sheath heater.
- the sheath heater generally has a heat generating wire held in a metal tube-like sheath, and a gap between the metal sheath and the heat generating wire is filled with an insulating material having high thermal conductivity. Since the surface of the heating element is electrically insulated, the sheath heater can directly heat gas, liquid, metal and the like. Further, the sheath heater can be laid out in an arbitrary shape, and is used for various purposes because of its convenience. For this reason, there is an increasing demand for a sheath heater having a smaller diameter so that it can be laid out in a more complicated shape corresponding to various needs. On the other hand, since the sheath heater heats the heating wire by supplying electricity, a device for improving the durability of the heating wire is also required.
- Patent Document 1 discloses a sheath heater including a plurality of heating wires in a single metal sheath. Usually, heating is performed using one of a plurality of heating wires, and when the heating wire is disconnected, the purpose is to recover easily and quickly by switching the power supply circuit to another heating wire.
- the sheath heater described in Patent Document 1 is provided for the disconnection of the heating wire, and is not considered to suppress the disconnection of the heating wire. Moreover, there is no mention about the diameter reduction of a sheath heater.
- One of the problems of the embodiments of the present invention is to provide a thin sheath heater with improved reliability.
- a metal sheath a heating wire that is disposed in the metal sheath with a gap, is in a strip shape, and is rotated with respect to the axial direction of the metal sheath, and an insulation that is disposed in the gap.
- a sheath heater comprising a material and a connection terminal disposed at one end of the metal sheath and electrically connected to both ends of the heating wire.
- the heating wire may be arranged in a double spiral structure in a biaxial region in the metal sheath.
- the insulating material may be an inorganic insulating powder.
- the metal sheath may be aluminum
- the heating wire may be a nickel-chromium alloy
- the insulating material may be magnesium oxide
- the sheath heater according to the first embodiment of the present invention has a heating mechanism.
- the sheath heater according to the first embodiment can be used to directly heat gas, liquid, metal and the like.
- the sheath heater according to the first embodiment is not limited to that used for the heated object.
- FIGS. 1A and 1B are cross-sectional configuration diagrams showing a sheath heater according to an embodiment of the present invention.
- the sheath heater according to the first embodiment includes a belt-like heating wire 20, an insulating material 30, a metal sheath 40, and a connection terminal 50.
- the heating wire 20 is disposed in a cylindrical metal sheath 40 with a gap, and the heating wire 20 and the metal sheath 40 are insulated by an insulating material 30 disposed in the gap.
- the metal sheath 40 is shown in a shape with one end closed, but is not limited to this, and may have a shape in which both ends are open.
- the heating wire 20 is disposed so as to reciprocate in the cylindrical axis direction within the metal sheath 40, and both ends of the heating wire 20 are disposed at one end of the metal sheath 40. That is, one heating wire 20 is arranged to be biaxial in most of the metal sheath 40 in the cylindrical axis direction.
- Each heating wire 20 disposed in the metal sheath 40 is disposed with a gap and is insulated by an insulating material 30 disposed in the gap.
- FIG. 1B is a cross-sectional view taken along the line C-C ′ of FIG. 1A.
- the width d1 of the belt-like heating wire 20 is preferably in the range of 0.1 mm to 2.0 mm.
- the thickness d2 of the belt-like heating wire 20 is preferably in the range of 0.1 mm to 0.5 mm.
- the inner diameter d3 of the metal sheath 40 is preferably in the range of 3.0 mm to 4.0 mm.
- the thickness d4 of the metal sheath 40 is preferably in the range of 0.5 mm to 1.0 mm.
- the outer diameter d5 of the metal sheath 40 is preferably in the range of 3.5 mm to 5.0 mm. Since the sheath heater 120 according to the present embodiment has the above-described configuration, it is possible to reduce the diameter while maintaining reliability. By reducing the diameter of the sheath heater 120, the sheath heater 120 can be laid out in a fine pattern shape.
- the shortest distance g1 between the metal sheath 40 and each heating wire 20 disposed in the metal sheath 40 in a cross section orthogonal to the cylindrical axis is in a range of 0.3 mm to 1.0 mm.
- the shortest distance g1 between the metal sheath 40 and the heating wire 20 is more preferably in the range of 0.4 mm to 1.0 mm.
- the distance g2 of each heating wire 20 arranged in the metal sheath 40 in the cross section orthogonal to the cylindrical axis is in the range of 0.3 mm to 2.0 mm.
- the shortest distance g2 of each heating wire 20 disposed in the metal sheath 40 is more preferably in the range of 0.4 mm to 1.0 mm.
- connection terminal 50a and a connection terminal 50b Both ends of the heating wire 20 are provided with a connection terminal 50a and a connection terminal 50b that are electrically connected to each other.
- connection terminal 50a and the connection terminal 50b are not particularly distinguished, they are referred to as connection terminals 50.
- the sheath heater 120 of the present embodiment has a biaxial single-terminal configuration in which two connection terminals 50 are disposed at one end of the sheath heater 120.
- One end of the sheath heater 120 having the connection terminal 50 is connected to an external device (heater controller, power source, etc.).
- the sheath heater 120 is heated by the electric power supplied from the external device, and thereby the temperature of the sheath heater 120 is controlled.
- the belt-like heating wire 20 is arranged to rotate with respect to the cylindrical axis direction of the metal sheath 40.
- the belt-like heating wire 20 extends in the cylindrical axis direction in a state where the major axis of the heating wire 20 is rotated in the direction perpendicular to the cylindrical axis of the metal sheath 40. That is, each heating wire 20 is coiled in a spiral shape.
- the rotation axes of the biaxial heating wires 20 are arranged substantially parallel to the cylindrical axis direction of the metal sheath 40, respectively.
- the heating wire 20 By arranging the heating wire 20 in a coiled state, the length of the heating wire 20 arranged in the metal sheath 40 increases, and the resistance value of the sheath heater 120 can be increased. Furthermore, the heating wire 20 has a spring property by being arranged in a coiled state, and disconnection during thermal expansion is suppressed. For this reason, for example, even if the difference in thermal expansion coefficient between the metal sheath 40 and the heating wire 20 is large, it is possible to provide the sheath heater 120 with improved reliability.
- the rotation pitch L1 which is the length in the cylindrical major axis direction of the metal sheath 40 in which the heating wire 20 arranged in the metal sheath 40 rotates spirally, is preferably 3.0 mm or less.
- the rotation pitch L1 of the heating wires 20 disposed in the metal sheath 40 is more preferably 2.5 mm or less, and even more preferably 2.0 mm or less.
- FIGS. 2A to 2D are cross-sectional configuration diagrams showing a sheath heater according to an embodiment of the present invention.
- 2A to 2D are cross-sectional views of the sheath heater 120 moved by a quarter pitch (L1 / 4) in the cylindrical axis direction of the metal sheath 40.
- FIG. The arrangement of the heating lines 20 in the present embodiment will be described in detail with reference to FIGS. 2A to 2D.
- the dotted line in FIG. 2A shows the trajectory of the heating wire 20 when the heating wire 20 makes one spiral turn.
- each heating wire 20 rotates 90 degrees around the rotation axis.
- the rotation axis of each heating wire 20 is parallel to the cylindrical axis direction and is separated by a distance g2 of the biaxial heating wire 20.
- the surface direction formed by the width d1 of the heating wire 20 is substantially perpendicular to the normal line of the rotating surface. That is, the surface of the belt-shaped heating wire 20 is a tangential plane of the rotation surface. Furthermore, the surface direction of the biaxial heating wire 20 is substantially parallel.
- the direction in which the central axis of each heating wire 20 rotates spirally in the direction of the cylindrical axis of the metal sheath 40 is substantially the same, and the rotation pitch L1 is also the same. Since the rotation direction of each heating wire 20 and the rotation pitch L1 coincide with each other, the distance g2 between the two heating wires 20 can be kept constant, and the reliability of the sheath heater 120 can be maintained. It becomes.
- the present invention is not limited to this, and the rotation direction and / or the rotation pitch L1 of each heating wire 20 may be different.
- the sheath heater 120 according to the present embodiment is designed so that the reliability can be maintained even when the rotation of the heating wire 20 is taken into consideration by satisfying the above condition.
- the cross-sectional shape of the sheath heater 120 is a circle. Since the cross-sectional shape of the sheath heater 120 is circular, the sheath heater 120 can be easily bent into a desired shape. However, the cross-sectional shape of the sheath heater 120 is not limited to this, and can have any shape as long as the above conditions are satisfied, and can be deformed into any shape.
- a conductor that generates Joule heat when energized can be used for the belt-like heating wire 20.
- a metal selected from tungsten, tantalum, molybdenum, platinum, nickel, chromium, and cobalt can be included.
- the metal may be an alloy containing these metals, for example, an alloy of nickel and chromium, an alloy containing nickel, chromium, and cobalt.
- a nickel-chromium alloy is used as the material of the heating wire 20.
- the insulating material 30 is disposed in order to prevent the heating wire 20 from being electrically connected to other members. That is, a material that sufficiently insulates the heating wire 20 from other members can be used. Furthermore, the thermal conductivity of the material used for the insulating material 30 is preferably 10 W / mK or more. When the thermal conductivity of the material used for the insulating material 30 is 10 W / mK or more, the heat energy generated by the heating wire 20 can be efficiently transmitted to the metal sheath 40.
- magnesium oxide, aluminum oxide, boron nitride, aluminum nitride, or the like can be used. In the present embodiment, magnesium oxide (MgO) powder is used as the insulating material 30.
- the thermal conductivity of the compact of magnesium oxide (MgO) is about 10 W / mK.
- the thermal conductivity of the material used for the metal sheath 40 is preferably 200 W / mK or more.
- the thermal conductivity of the material used for the metal sheath 40 is 200 W / mK or more, the heat energy generated by the heating wire 20 can be efficiently transmitted to the object to be heated.
- the coefficient of thermal expansion of the material used for the metal sheath 40 is preferably 25 ⁇ 10 ⁇ 6 / K or less.
- aluminum is used as the material of the metal sheath 40.
- the material of the metal sheath 40 is not limited to this, and materials such as aluminum (Al), titanium (Ti), and stainless steel (SUS) can be used. Since the thermal expansion coefficient of the material used for the metal sheath 40 is 25 ⁇ 10 ⁇ 6 / K or less, disconnection of the heating wire 20 due to thermal expansion of the metal sheath 40 can be suppressed, and a highly reliable sheath heater 120 can be provided.
- the sheath heater 120 can be reduced in diameter by having the belt-like heating wire 20.
- the sheath heater 120 can be laid out in a fine pattern shape.
- disconnection of the heating wire 20 during thermal expansion is suppressed.
- the thermal expansion coefficient between the metal sheath 40 and the heating wire 20 is reduced. Even if the difference is large, it is possible to provide the sheath heater 120 with improved reliability.
- FIGS. 3A, 3B and FIGS. 4A to 4D are cross-sectional configuration diagrams illustrating a sheath heater according to an embodiment of the present invention.
- the sheath heater according to the second embodiment includes a belt-like heating wire 20, an insulating material 30, a metal sheath 40, and a connection terminal 50, as in the first embodiment.
- sheath heater 130 according to the second embodiment is the same as that of the first embodiment except for the arrangement of the heating wire 20 in the metal sheath 40, the description of the overlapping structure and configuration will be omitted, and the main difference will be described. Will be described.
- the heating wire 20 is disposed in the cylindrical metal sheath 40 with a gap, and the heating wire 20 and the metal sheath 40 are insulated by an insulating material 30 disposed in the gap.
- the metal sheath 40 is shown in a shape with one end closed, but is not limited thereto, and may have a shape in which both ends are open.
- the heating wire 20 is disposed so as to reciprocate in the cylindrical axis direction within the metal sheath 40, and both ends of the heating wire 20 are disposed at one end of the metal sheath 40. That is, one heating wire 20 is arranged to be biaxial in most of the metal sheath 40 in the cylindrical axis direction.
- Each heating wire 20 disposed in the metal sheath 40 is disposed with a gap and is insulated by an insulating material 30 disposed in the gap.
- FIG. 3B is a cross-sectional view taken along the line C-C ′ of FIG. 3A.
- the width d1 of the belt-like heating wire 20 is preferably in the range of 0.1 mm to 2.0 mm.
- the thickness d2 of the belt-like heating wire 20 is preferably in the range of 0.1 mm to 0.5 mm.
- the inner diameter d3 of the metal sheath 40 is preferably in the range of 3.0 mm to 4.0 mm.
- the thickness d4 of the metal sheath 40 is preferably in the range of 0.5 mm to 1.0 mm.
- the outer diameter d5 of the metal sheath 40 is preferably in the range of 3.5 mm to 5.0 mm. Since the sheath heater 130 according to the present embodiment has the above configuration, it is possible to reduce the diameter while maintaining reliability. By reducing the diameter of the sheath heater 130, the sheath heater 130 can be laid out in a fine pattern shape.
- the shortest distance g1 between the metal sheath 40 and each heating wire 20 disposed in the metal sheath 40 in a cross section orthogonal to the cylindrical axis is in a range of 0.3 mm to 1.0 mm.
- the shortest distance g1 between the metal sheath 40 and the heating wire 20 is more preferably in the range of 0.4 mm to 1.0 mm.
- the distance g2 of each heating wire 20 arranged in the metal sheath 40 in the cross section orthogonal to the cylindrical axis is in the range of 0.3 mm to 2.0 mm.
- the shortest distance g2 of each heating wire 20 disposed in the metal sheath 40 is more preferably in the range of 0.4 mm to 1.0 mm.
- connection terminal 50a and a connection terminal 50b Both ends of the heating wire 20 are provided with a connection terminal 50a and a connection terminal 50b that are electrically connected to each other.
- connection terminal 50a and the connection terminal 50b are not particularly distinguished, they are referred to as connection terminals 50.
- the sheath heater 130 of the present embodiment has a biaxial single-terminal configuration in which the two connection terminals 50 are disposed at one end of the sheath heater 130.
- One end of the sheath heater 130 having the connection terminal 50 is connected to an external device (heater controller, power source, etc.).
- the sheath heater 130 is heated by the electric power supplied from the external device, and thereby the temperature of the sheath heater 130 is controlled.
- the belt-like heating wire 20 is arranged to rotate with respect to the cylindrical axis direction of the metal sheath 40.
- the belt-like heating wire 20 extends in the cylindrical axis direction in a state where the major axis of the heating wire 20 is rotated in the direction perpendicular to the cylindrical axis of the metal sheath 40. Further, the heating wires 20 are arranged in a state where the rotation axes of the heating wires 20 substantially coincide with each other. That is, the biaxial heating wire 20 is coiled in a double spiral shape.
- the rotation axis of the biaxial heating wire 20 is arranged substantially parallel to the cylindrical axis direction of the metal sheath 40.
- the heat generating wire 20 By arranging the heat generating wire 20 in a coiled state, the length of the heat generating wire 20 disposed in the metal sheath 40 increases, and the resistance value of the sheath heater 130 can be increased. Furthermore, the heating wire 20 has a spring property by being arranged in a coiled state, and disconnection during thermal expansion is suppressed. For this reason, for example, even if the difference in thermal expansion coefficient between the metal sheath 40 and the heating wire 20 is large, it is possible to provide the sheath heater 130 with improved reliability.
- the rotation pitch L2 which is the length of the metal sheath 40 in which the heating wire 20 arranged in the metal sheath 40 rotates spirally in the cylindrical major axis direction is 6.0 mm or less.
- the rotation pitch L2 of the heating wire 20 disposed in the metal sheath 40 is more preferably 2.5 mm or less, and even more preferably 2.0 mm or less.
- the shortest distance L3 in the rotation axis direction of each heating wire 20 is 2.3 mm or more.
- FIGS. 4A to 4D are cross-sectional configuration diagrams showing a sheath heater according to an embodiment of the present invention.
- 4A to 4D are cross-sectional views of the sheath heater 130 that is moved by a quarter pitch (L2 / 4) in the cylindrical axis direction of the metal sheath 40.
- FIG. The arrangement of the heating lines 20 in this embodiment will be described in detail with reference to FIGS. 4A to 4D.
- the dotted line in FIG. 4A shows the trajectory of the heating wire 20 when the heating wire 20 makes one spiral turn.
- FIG. 4D when the 1 ⁇ 4 pitch (L2 / 4) is moved in the cylindrical axis direction, each heating wire 20 rotates 90 degrees around the same rotation axis.
- the rotation axis of the heating wire 20 is parallel to the cylindrical axis direction.
- the surface direction formed by the width d1 of the heating wire 20 is substantially perpendicular to the normal line of the rotating surface. That is, the surface of the belt-shaped heating wire 20 is a tangential plane of the rotation surface. Furthermore, the surface direction of the biaxial heating wire 20 is substantially parallel.
- the direction in which the central axis of each heating wire 20 rotates in a double spiral shape in the direction of the cylindrical axis of the metal sheath 40 is shifted by 180 °, and the rotation pitches L2 substantially coincide. That is, the rotation of each heating wire 20 is shifted by 1/2 pitch.
- the rotation pitches L2 of the heating lines 20 are the same, the distance g2 between the biaxial heating lines 20 can be maintained constant, and the reliability of the sheath heater 130 can be maintained.
- the present invention is not limited to this, and the deviation in the rotation direction of each heating wire 20 may not be 180 °.
- the sheath heater 130 according to the present embodiment is reliable even if the rotation of the heating wire 20 is taken into consideration, as long as the shortest distance L3 in the cylindrical axis direction of the metal sheath 40 of the biaxial heating wire 20 satisfies g2. Designed to maintain.
- the cross-sectional shape of the sheath heater 130 is a circle. Since the cross-sectional shape of the sheath heater 130 is circular, the sheath heater 130 can be easily bent into a desired shape. However, the cross-sectional shape of the sheath heater 130 is not limited to this, and can have any shape as long as the above conditions are satisfied, and can be deformed into any shape.
- the sheath heater 130 according to the present embodiment can be reduced in diameter by having the belt-like heating wire 20.
- the sheath heater 130 can be laid out in a fine pattern shape.
- disconnection of the heating wire 20 during thermal expansion is suppressed.
- thermal expansion between the metal sheath 40 and the heating wire 20 is suppressed. Even if the difference in rate is large, it is possible to provide the sheath heater 130 with improved reliability.
- FIG. 5 is a cross-sectional configuration diagram illustrating the sheath heater according to the first embodiment of the present invention.
- Example 1 has substantially the same configuration as that of the first embodiment described above, and each parameter is as follows.
- Material of heating wire 20 Nickel-chromium alloy (80% nickel, 20% chromium)
- the width d1 of the heating wire 20 is 1 mm.
- the thickness d2 of the heating wire 20 is 0.1 mm.
- the shortest distance between the biaxial heating wires 20 0.5 mm Distance between rotating shafts of heating wire 20: 1.5 mm Heating wire 20 rotating diameter: 1 mm Heating wire 20 rotation pitch L1: 2 mm Minimum distance between the metal sheath 40 and the heating wire 20: 0.5 mm Material of metal sheath 40: Inner diameter d3 of aluminum metal sheath 40: 3.5 mm Metal sheath 40 thickness d4: 0.5 mm Outer diameter d5 of metal sheath 40: 4.5 mm
- Comparative Example 1 In the comparative example 1, since it is the structure similar to Example 1 except having used the round heating wire 20, description of the same structure is abbreviate
- Material of heating wire 20 Nickel-chromium alloy (80% nickel, 20% chromium) Diameter of heating wire round wire: ⁇ 0.4mm
- FIG. 6A shows a CT scan image of the sheath heater according to the first embodiment.
- FIG. 6B shows a 3D image of the sheath heater according to the first embodiment.
- the insulation distance between the coiled heating wire and the metal sheath, and the insulation distance between the heating wires should be 0.41 mm or more. did it.
- the sheath heater of Comparative Example 1 it was observed that the coiled round heating wire had an insulation distance from the metal sheath and a location where the insulation distance between the heating wires was 0.2 mm or less. In the sheath heater in which the band wire of Example 1 was coiled, it was possible to perform coiling while ensuring insulation in a thin metal sheath.
Landscapes
- Resistance Heating (AREA)
Abstract
Description
[シースヒータの構成]
図1A、図1Bおよび図2A~図2Dを用いて、本発明の第1実施形態に係るシースヒータの構成について説明する。本発明の第1実施形態に係るシースヒータは、加熱機構を有する。また、第1実施形態に係るシースヒータは、気体、液体、金属などを直接、加熱するのに使用することができる。ただし、第1実施形態に係るシースヒータは上記被加熱物に使用するものに限定されない。
[シースヒータの構成]
図3A、図3Bおよび図4A~図4Dを用いて、本発明の第2実施形態に係るシースヒータの構成について説明する。図3Aおよび図3Bは、本発明の一実施形態に係るシースヒータを示す断面構成図である。図3Aおよび図3Bに示すように、第2実施形態に係るシースヒータは、第1実施形態と同様に、帯状の発熱線20、絶縁材30、金属シース40、および接続端子50を有する。第2実施形態に係るシースヒータ130は、金属シース40内での発熱線20の配置以外は、第1実施形態と同様であるので、重複する構造および構成に関しては説明を省略し、主に相違点について説明する。
図5は、本発明の実施例1におけるシースヒータを示す断面構成図である。実施例1は、上述した第1実施形態と略同様の構成であり、各パラメータは以下の通りである。
発熱線20の材質:ニッケル-クロム合金(ニッケル80%、クロム20%)
発熱線20の帯線の幅d1:1mm
発熱線20の帯線の厚みd2:0.1mm
2軸の発熱線20同士の最短距離:0.5mm
発熱線20の回転軸間の距離:1.5mm
発熱線20の回転径:1mm
発熱線20の回転ピッチL1:2mm
金属シース40と発熱線20との最短距離:0.5mm
金属シース40の材質:アルミニウム
金属シース40の内径d3:3.5mm
金属シース40の厚みd4:0.5mm
金属シース40の外径d5:4.5mm
比較例1では、丸線の発熱線20を用いたこと以外、実施例1と同様の構成であることから、同じ構成の説明は省略する。
発熱線20の材質:ニッケル-クロム合金(ニッケル80%、クロム20%)
発熱線の丸線の直径:Φ0.4mm
上述した実施例1および比較例1のシースヒータにおける抵抗値を測定した。実施例1のシースヒータにおける抵抗値は5~40Ω/mであった。一方で、比較例1のシースヒータにおける抵抗値は170Ω/m以上であった。実施例1の帯線をコイリングしたシースヒータにおいては、単位長さ当たりの出力を高くすることができた。
上述した実施例1および比較例1のシースヒータをCTスキャンによって観察した。図6Aに実施例1に係るシースヒータのCTスキャン画像を示す。図6Bに実施例1に係るシースヒータの3D画像を示す。図6Aおよび図6Bに示すように、実施例1のシースヒータにおいて、コイリングされた帯線の発熱線と金属シースとの絶縁距離、および発熱線同士の絶縁距離は0.41mm以上を確保することができた。一方で、比較例1のシースヒータにおいて、コイリングされた丸線の発熱線は金属シースとの絶縁距離、および発熱線同士の絶縁距離が0.2mm以下となる箇所が観察された。実施例1の帯線をコイリングしたシースヒータにおいては、細径の金属シース内で絶縁性を確保しつつ、コイリングすることができた。
Claims (4)
- 金属シースと、
前記金属シース内に間隙をもって配置され、帯状であり、前記金属シースの軸方向に対して回転して配置される発熱線と、
前記間隙に配置される絶縁材と、
前記金属シースの一端に配置され、前記発熱線の両端それぞれと電気的に接続する接続端子と、
を備えるシースヒータ。 - 前記発熱線は、前記金属シース内で2軸となる領域において、2重らせん構造に配置される請求項1に記載のシースヒータ。
- 前記絶縁材は、無機絶縁粉末である請求項1に記載のシースヒータ。
- 前記金属シースはアルミニウムであり、前記発熱線はニッケル-クロム合金であり、前記絶縁材は酸化マグネシウムである請求項1に記載のシースヒータ。
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201880024287.8A CN110547041B (zh) | 2017-04-12 | 2018-04-03 | 护套加热器 |
| EP18784228.1A EP3611999B1 (en) | 2017-04-12 | 2018-04-03 | Sheath heater |
| KR1020197030535A KR102248680B1 (ko) | 2017-04-12 | 2018-04-03 | 시스 히터 |
| US16/653,094 US11477858B2 (en) | 2017-04-12 | 2019-10-15 | Sheath heater |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-078969 | 2017-04-12 | ||
| JP2017078969A JP2018181586A (ja) | 2017-04-12 | 2017-04-12 | シースヒータ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US16/653,094 Continuation US11477858B2 (en) | 2017-04-12 | 2019-10-15 | Sheath heater |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2018190197A1 true WO2018190197A1 (ja) | 2018-10-18 |
Family
ID=63792625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2018/014259 Ceased WO2018190197A1 (ja) | 2017-04-12 | 2018-04-03 | シースヒータ |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11477858B2 (ja) |
| EP (1) | EP3611999B1 (ja) |
| JP (1) | JP2018181586A (ja) |
| KR (1) | KR102248680B1 (ja) |
| CN (1) | CN110547041B (ja) |
| TW (1) | TWI687128B (ja) |
| WO (1) | WO2018190197A1 (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6902382B2 (ja) * | 2017-04-12 | 2021-07-14 | 日本発條株式会社 | ヒータユニット |
| JP2018181586A (ja) | 2017-04-12 | 2018-11-15 | 日本発條株式会社 | シースヒータ |
| JP7594852B2 (ja) * | 2018-10-11 | 2024-12-05 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
| JP7272777B2 (ja) | 2018-10-17 | 2023-05-12 | 日本発條株式会社 | ヒータ |
| JP6788079B1 (ja) * | 2019-08-02 | 2020-11-18 | 日本発條株式会社 | ヒータ、およびステージ |
| DE102019127691A1 (de) * | 2019-10-15 | 2021-04-15 | Türk & Hillinger GmbH | Elektrisches Heizelement, elektrische Heizvorrichtung und Verfahren zur Herstellung einer elektrischen Heizvorrichtung mit einem solchen Heizelement |
| JP7672264B2 (ja) | 2021-03-31 | 2025-05-07 | 日本発條株式会社 | シースヒータ及びそれを有する基板支持装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188853U (ja) * | 1975-01-13 | 1976-07-16 | ||
| JPS5486756U (ja) * | 1977-12-01 | 1979-06-19 | ||
| JPS54126146U (ja) * | 1978-02-22 | 1979-09-03 | ||
| JPS5854577A (ja) * | 1981-09-29 | 1983-03-31 | 株式会社東芝 | シ−ズヒ−タ |
| JP2002151239A (ja) | 2000-11-13 | 2002-05-24 | Sukegawa Electric Co Ltd | シースヒータユニット |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR363975A (fr) * | 1905-03-09 | 1906-08-10 | William Arthur Stinson | Perfectionnements apportés aux systèmes de fermeture pour sacs à dépeches |
| JPS5146028Y2 (ja) | 1971-08-20 | 1976-11-08 | ||
| JPS52161342U (ja) * | 1976-05-31 | 1977-12-07 | ||
| JPS5854517A (ja) * | 1981-09-28 | 1983-03-31 | 東芝ライテック株式会社 | 端子付電線 |
| JP2857966B2 (ja) | 1993-05-19 | 1999-02-17 | 助川電気工業株式会社 | シーズヒータ |
| JP2710043B2 (ja) * | 1995-11-15 | 1998-02-10 | 助川電気工業株式会社 | シーズヒーターコア及びシーズヒーター |
| US5844205A (en) | 1996-04-19 | 1998-12-01 | Applied Komatsu Technology, Inc. | Heated substrate support structure |
| US6035101A (en) * | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
| JPH11343571A (ja) | 1998-05-29 | 1999-12-14 | Ngk Insulators Ltd | サセプター |
| JP2000243542A (ja) * | 1999-02-24 | 2000-09-08 | Nhk Spring Co Ltd | ヒータユニット及びその製造方法 |
| JP4065639B2 (ja) | 2000-02-01 | 2008-03-26 | 株式会社アルバック | パネルヒータ |
| KR100702756B1 (ko) | 2000-08-21 | 2007-04-03 | 닛폰 하츠죠 가부시키가이샤 | 히터 유닛 및 그 제조 방법 |
| US8263908B2 (en) | 2004-10-08 | 2012-09-11 | Furukawa-Sky Aluminum Corp. | Heater plate and a method for manufacturing the heater plate |
| US20080197125A1 (en) * | 2007-02-16 | 2008-08-21 | Applied Materials, Inc. | Substrate heating method and apparatus |
| US8193472B2 (en) | 2007-03-23 | 2012-06-05 | Nihon Dennetsu Co., Ltd. | Susceptor |
| JP5374715B2 (ja) | 2007-09-07 | 2013-12-25 | 日本電熱株式会社 | ラミネート装置、ラミネート装置用の熱板及びラミネート装置用の熱板の製造方法 |
| JP5465373B2 (ja) * | 2007-09-12 | 2014-04-09 | 大日本スクリーン製造株式会社 | 熱処理装置 |
| JP5095349B2 (ja) * | 2007-10-31 | 2012-12-12 | 株式会社岡崎製作所 | 高温用シースヒータ |
| KR100900001B1 (ko) * | 2008-08-13 | 2009-05-28 | 최기철 | 금속관 히터를 이용하는 전열 장치 |
| CN201319673Y (zh) * | 2008-12-19 | 2009-09-30 | 镇江裕太防爆电加热器有限公司 | 高频电阻快速加热带 |
| JP5592706B2 (ja) * | 2010-06-02 | 2014-09-17 | 助川電気工業株式会社 | シースヒータのリード線接続端子 |
| CN201766729U (zh) * | 2010-08-26 | 2011-03-16 | 王孝来 | 一种新型的碳纤维石英电热管 |
| JP2013098138A (ja) | 2011-11-04 | 2013-05-20 | Hongkong Tachibana Electronics Co Ltd | コード状発熱線装置 |
| JP2013134851A (ja) | 2011-12-26 | 2013-07-08 | Hongkong Tachibana Electronics Co Ltd | コード状発熱線装置 |
| US9113501B2 (en) * | 2012-05-25 | 2015-08-18 | Watlow Electric Manufacturing Company | Variable pitch resistance coil heater |
| JP5951543B2 (ja) | 2013-03-28 | 2016-07-13 | ニチアス株式会社 | 金属発熱体および発熱構造体 |
| JP2015069931A (ja) | 2013-09-30 | 2015-04-13 | ニチアス株式会社 | ジャケットヒータ |
| US20150114949A1 (en) * | 2013-10-31 | 2015-04-30 | Sang Won Lee | Sheath Heater Capable of Reducing Electro-magnetic Wave |
| GB2525182B (en) * | 2014-04-14 | 2018-10-03 | Norcros Group Holdings Ltd | An instantaneous electric water heater, a heat exchanger and an electric shower |
| DE102015114886B4 (de) * | 2015-09-04 | 2022-05-12 | Türk & Hillinger GmbH | Verfahren zur Herstellung einer Heizvorrichtung für Fluide |
| JP6902382B2 (ja) * | 2017-04-12 | 2021-07-14 | 日本発條株式会社 | ヒータユニット |
| JP2018181586A (ja) | 2017-04-12 | 2018-11-15 | 日本発條株式会社 | シースヒータ |
| WO2019185291A1 (de) * | 2018-03-26 | 2019-10-03 | Leister Technologies Ag | Keramischer heizwiderstand, elektrisches heizelement sowie vorrichtung zur erwärmung eines fluides |
| JP7096587B2 (ja) * | 2018-09-18 | 2022-07-06 | 新熱工業株式会社 | シーズヒータ |
| JP7594852B2 (ja) * | 2018-10-11 | 2024-12-05 | 日本発條株式会社 | ステージ、成膜装置、および膜加工装置 |
| JP7272777B2 (ja) * | 2018-10-17 | 2023-05-12 | 日本発條株式会社 | ヒータ |
| DE102019127691A1 (de) * | 2019-10-15 | 2021-04-15 | Türk & Hillinger GmbH | Elektrisches Heizelement, elektrische Heizvorrichtung und Verfahren zur Herstellung einer elektrischen Heizvorrichtung mit einem solchen Heizelement |
-
2017
- 2017-04-12 JP JP2017078969A patent/JP2018181586A/ja not_active Withdrawn
-
2018
- 2018-04-03 CN CN201880024287.8A patent/CN110547041B/zh active Active
- 2018-04-03 KR KR1020197030535A patent/KR102248680B1/ko active Active
- 2018-04-03 EP EP18784228.1A patent/EP3611999B1/en active Active
- 2018-04-03 WO PCT/JP2018/014259 patent/WO2018190197A1/ja not_active Ceased
- 2018-04-11 TW TW107112410A patent/TWI687128B/zh active
-
2019
- 2019-10-15 US US16/653,094 patent/US11477858B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188853U (ja) * | 1975-01-13 | 1976-07-16 | ||
| JPS5486756U (ja) * | 1977-12-01 | 1979-06-19 | ||
| JPS54126146U (ja) * | 1978-02-22 | 1979-09-03 | ||
| JPS5854577A (ja) * | 1981-09-29 | 1983-03-31 | 株式会社東芝 | シ−ズヒ−タ |
| JP2002151239A (ja) | 2000-11-13 | 2002-05-24 | Sukegawa Electric Co Ltd | シースヒータユニット |
Non-Patent Citations (1)
| Title |
|---|
| See also references of EP3611999A4 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3611999A4 (en) | 2020-12-16 |
| EP3611999B1 (en) | 2025-07-30 |
| US11477858B2 (en) | 2022-10-18 |
| US20200045779A1 (en) | 2020-02-06 |
| KR102248680B1 (ko) | 2021-05-07 |
| JP2018181586A (ja) | 2018-11-15 |
| KR20190128213A (ko) | 2019-11-15 |
| TW201838476A (zh) | 2018-10-16 |
| TWI687128B (zh) | 2020-03-01 |
| CN110547041A (zh) | 2019-12-06 |
| CN110547041B (zh) | 2022-06-03 |
| EP3611999A1 (en) | 2020-02-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11477858B2 (en) | Sheath heater | |
| US11490464B2 (en) | Heater unit | |
| JP7096587B2 (ja) | シーズヒータ | |
| JP3648479B2 (ja) | 電子写真画像形成装置の定着ローラー組立体及びその製造方法 | |
| US20240032156A1 (en) | Sheathed heater and substrate support device including the same | |
| JP2018092800A (ja) | ヒーター装置 | |
| CN109788587A (zh) | 一种加热装置 | |
| US4499334A (en) | Heat resistant sheathed insulated electrical conductors | |
| JPH04220932A (ja) | 高平均電力マグネトロンの急速予熱陰極ヒータ | |
| JP2009110881A (ja) | 高温用シースヒータ | |
| JP2015178861A (ja) | 単線状部材の固定方法、ヒーターユニット及びヒーター | |
| KR930003207B1 (ko) | 소직경의 복사 튜브 가열장치 | |
| CN121057056A (zh) | 加热器 | |
| JP3042893B2 (ja) | 絶縁コアを備えた管状加熱要素 | |
| JP2003086336A (ja) | カートリッジヒータ | |
| JP2003068432A (ja) | 電気ヒータ | |
| JPH05251164A (ja) | 電気ラジアントヒータ | |
| JP2003007437A (ja) | 円形発熱体 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 18784228 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| ENP | Entry into the national phase |
Ref document number: 20197030535 Country of ref document: KR Kind code of ref document: A |
|
| ENP | Entry into the national phase |
Ref document number: 2018784228 Country of ref document: EP Effective date: 20191112 |
|
| WWG | Wipo information: grant in national office |
Ref document number: 2018784228 Country of ref document: EP |