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SG165408A1 - Optical inspection system - Google Patents

Optical inspection system

Info

Publication number
SG165408A1
SG165408A1 SG201006871-6A SG2010068716A SG165408A1 SG 165408 A1 SG165408 A1 SG 165408A1 SG 2010068716 A SG2010068716 A SG 2010068716A SG 165408 A1 SG165408 A1 SG 165408A1
Authority
SG
Singapore
Prior art keywords
inspection system
optical inspection
curved surface
present
inspection
Prior art date
Application number
SG201006871-6A
Other languages
English (en)
Inventor
David Shiao-Tsing Chiang
Todd Aldridge Russell
Wei Tan
Original Assignee
Novartis Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novartis Ag filed Critical Novartis Ag
Publication of SG165408A1 publication Critical patent/SG165408A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Lenses (AREA)
  • Studio Devices (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SG201006871-6A 2005-09-21 2006-09-19 Optical inspection system SG165408A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71900605P 2005-09-21 2005-09-21
US73716805P 2005-11-16 2005-11-16

Publications (1)

Publication Number Publication Date
SG165408A1 true SG165408A1 (en) 2010-10-28

Family

ID=37633640

Family Applications (2)

Application Number Title Priority Date Filing Date
SG10201507797WA SG10201507797WA (en) 2005-09-21 2006-09-19 Optical inspection system
SG201006871-6A SG165408A1 (en) 2005-09-21 2006-09-19 Optical inspection system

Family Applications Before (1)

Application Number Title Priority Date Filing Date
SG10201507797WA SG10201507797WA (en) 2005-09-21 2006-09-19 Optical inspection system

Country Status (6)

Country Link
EP (1) EP1934573B1 (fr)
CN (1) CN101268353B (fr)
HU (1) HUE043416T2 (fr)
MY (1) MY163702A (fr)
SG (2) SG10201507797WA (fr)
WO (1) WO2007039100A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102607813B (zh) * 2012-03-17 2014-10-22 哈尔滨工业大学 基于线光源的光学系统横向放大率测量方法
US9752992B2 (en) * 2014-03-25 2017-09-05 Kla-Tencor Corporation Variable image field curvature for object inspection

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157037A (ja) * 1984-01-26 1985-08-17 Hajime Sangyo Kk 物体の表面検査装置
JPH0627965B2 (ja) * 1984-05-18 1994-04-13 キヤノン株式会社 ホログラムの作製法
US5822091A (en) * 1993-02-22 1998-10-13 Baker; Kenneth M. Extreme depth-of-field optical lens and holographic projector system for its production
US6148097A (en) * 1995-06-07 2000-11-14 Asahi Kogaku Kogyo Kabushiki Kaisha Optical member inspecting apparatus and method of inspection thereof
JPH09288040A (ja) * 1996-04-19 1997-11-04 Topcon Corp レンズメータ
WO2004097715A1 (fr) * 2003-05-01 2004-11-11 Novo Nordisk A/S Systeme optique
US20070121109A1 (en) * 2003-12-04 2007-05-31 Roger Biel Lens inspection

Also Published As

Publication number Publication date
HUE043416T2 (hu) 2019-08-28
EP1934573B1 (fr) 2019-03-13
CN101268353B (zh) 2012-02-08
CN101268353A (zh) 2008-09-17
MY163702A (en) 2017-10-13
SG10201507797WA (en) 2015-10-29
EP1934573A1 (fr) 2008-06-25
WO2007039100A1 (fr) 2007-04-12

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